Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Add 10 g for conduit type, 30 g for DIN terminal type, and 60 g for conduit terminal type respectively. Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 0.61 4.5 15 3 8 (10A) 1.1 6 26 8 1.6 38 1.0 10 2.2 53 1 2 (15A) 10 2.2 53 Note) Weight of grommet type.

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CKZ-50A007 CKZ-50A008 CKZ-50A009 NAAMS code ACA201M ACA202M ACA203M NAAMS code ACA211M ACA212M ACA213M Straight-Machined 25 mm Offset-Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 11 through 11 through H 300.025 300.025 250.05 I M61.0 H M61.0 150.03 150.03 I R45 6.5 500.05 6.5 18 30 3 10 10 3 18 R6 R6 R25 R25 19

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

70pvpump

= (10-3m2/s) = (mPas)/(kg/m3) 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) 17-5-164 25 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Working Principle: Built-in Solenoid Valve Type/Air Operated Type Discharge port (FLUID OUT) VC Diaphragm VDW Drive chamber VQ VX2 VX Return spring Courtesy of Steven Engineering, Inc.-230 Ryan Way

Compact Cylinder with Solenoid Valve/

of the rated voltage DC Power consumption 0.35 (With light: 0.4) W Bore size Standard stroke 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage

Prevents Micro-Bubbles

1/4, 3/8 LVC4 10 10, 12 3/8, 1/2 LVC5 16 12, 19 1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

7

BA8-032 MK2T CK1 CK1 Dimensions CLK2 CLKG 28 25 5 6 12 3 x Rc1/8 (Piping port) 3 x Rc1/8 (Piping port) CKQ CLKQ 20 4 9.5 Speed controller valve Cushion valve 4 32 CK CLK 12 4 45 45 M10 x 1.25 Max. 26.5 CKQ 12 40 26 41.5 12 Width across flats 36 R12 +0.5 +0.2 12 0.040 d9 0.076 Shaft: 10 Hole: 10 28 26 +0.022 H8 0 41.2 38 5 20 34 + Stroke 70 + Stroke 55 137 + Stroke Double knuckle joint Single

MRQ

30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body installed

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

Modular Type Regulator Series AR

30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25

MRHQ

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Piping adapter assembly - old style see E*00 - New Style , Easy maintenance

The RQ series new air cushion construction allows this series to retain the merits of a compact cylinder. The unique air cushion construction eliminates the cushion ring used in conventional type air cushions, which reduces the overall length of the cylinder. The RQ series meets the demands for reduced shock, noise reduction and improved repeatability at the stroke end. Unique air cushion

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.1 0.1 0 0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R IZF10R 25 25 20 Air flow level: 1 Discharge time [s] 20 20 Air flow level: 1 Air flow level: 1 Discharge time [s] Discharge time [s] 15 15 15 10 10 10 5 Air flow level: 4 5 5 Air flow level: 4 Air flow

Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

Shock Absorbers and Rate Controls

70-&' r q.oo 3, 24.4 l z.9 -3r 5l 25 ,{ 25 N/A 14.3 L45 300 e.60 -g' r 2.rof're.oo t? 25.4 12.9'3r ) t 25 25 PM2050g[(S] 306 l9.0fdo ?