AMR3000 to 6000

#4 VY G N Bracket mounting dimension With auto drain Model Port size A M L K J H G F E D C B U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130

ARJ1020F

Manifold Base (Option)/Dimensions VBA VE VY G AL Stations Manifold base part No. 4 6 10 A dimension B dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 1.5-4

Pneumatic Purification

DEWPOINT CFM CFM MAX PSIG A B C lbs IDF3D-S 5.8 12 115/1/60 3/8 145 R134a 8.9 14.1 18.5 39.7 IDF4D-S 8.1 18 115/1/60 3/8 215 R134a 9.5 18.9 23.9 57.3 IDF6D-S 12.6 26 115/1/60 1/2 215 R134a 8.7 23.6 20.5 70.5 IDF8D-S 16.5 35 115/1/60 3/4 215 R134a 8.7 23.6 20.5 70.5 IDF11C-S 25 53 115/1/60 3/4 215 R22 10.2 24.4 22.4 103.6 IDF15C-S 40 85 115/1/60 1 215 R22 11.0 24.4 24.4 110.2 IDF22C1-S 58 130

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

1 NAMUR Interface 3 Port Solenoid Valve Series VFN200N Specifications V100 Fluid Valve type Max. operating pressure Min. operating pressure Ambient and fluid temperature Lubrication Pilot operator manual override Enclosure Port size Cv factor (Effective area) Weight Other Air, Inert gas Normally closed 0.9 MPa {130 PSI} 0.15 MPa {22 PSI} 10 to +60C (1) SY SYJ VK Not required (2) Valve JIS

VFN2000N

1 NAMUR Interface 5 Port Solenoid Valve Series VFN2000N Specifications VK Fluid Max. operating pressure Min. operating pressure Ambient and fluid temperature Lubrication Pilot operator manual override Enclosure Port size Cv factor (Effective area) Weight Other AC DC Allowable voltage range Coil insulation Inrush Holding Power consumption DC Air/Inert gas 0.9 MPa {130 PSI} 0.15 MPa {22 PSI

Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb. 371.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Size/Port: 5C [Plug-in Type, Port Size: ø8, Flow: 130 L/min (ANR)]

Size/Port: 5H [One-touch Fitting Type, Applicable Tube OD: ø8, Flow: 130 L/min (ANR)]

Size/Port: 53 [Male Thread Type, Port Size: R1/4, Flow: 130 L/min (ANR)]

Size/Port: 52 [Male Thread Type, Port Size: R1/8, Flow: 130 L/min (ANR)]

accuracy [mm] Note 5)Finger backlash/ both sides [mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ322252 to 130

Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc.PFA0 (atmospheric pressure) to 0.35 MPa1/2andquot; x 3/8andquot;50 to 95 F (10 to 35C) (no condensation)FEP, Stainless steel 304, Stainless steel 31673 psi (0.5 MPa)IN/OUT: FEP tube 3/8andquot; x 1/4andquot;1.3 to 2.6 gpm (5 to 10 L/min)Temperature: 50 to 95F (10 to 35C), Humidity: 35 to 80%RH (no condensation)W5.1 (130

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130

Precision Cylinder Series MTS

SMTS20, #3 7 Precision Cylinder Series MTS Dimensions/25 MTS25 Basic type 12 10 53.5 51.5 2-cushion needle Width across flats 11 7.5 6 Rod cross section 7 6 2-M5 x 0.8 (port size) 28 0.2 16.5 15 M6 x 1.0 4.5 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130

Series AS-FM/AS-M/ASD-FM

Symbol 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" Inch size 12 7 Flow rate l/min (ANR) 38 Controlled flow 0.2 0.1 Effective area mm 0.6 100 Flow rate l/min (ANR) 460 230 290 130 Free flow Effective area mm 1.5 7 3.5 4.5 2 Note) The flow rate value is at a pressure of 0.5MPa and temperature of 20C. 9 Series AS-FM How to Order 200 1 F M 06 AS Applicable tube outside diameter Metric size Body size

Ambient Dryer Series AMG

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

unit Key switches Cable length 2m Basic performance Performance/Specifications LC6C-220AD Applicable controller Operating temperature range 5 to 40C Communication method Conforming to RS485 Parameter change, JOG operation, alarm reset, teaching, test Functions Protective function indication Alarm code Dimensions POWER ALM PARA AL-RES JOG MON TEACH I/O TEST STOP SMC LC5-1-T1 TEACHING BOX 130

Positioning Driver Series LC6C

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21