m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.
The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.