Series VCS

1 5 20 1 5 1 0 25 20 1 5 30 25 25 2.

Air Cylinder CP Series Cylinder Positioner Assembly

$i3:;i, (3ol;1 2.40 ) 79+ 0 0033 M26rl 5 0.83 1 5 0 1.57 (61) (37) (40) (83) (38) \2t) Mi lLmete6 in Parenlheses CLEVIS PIN ROD CLEVI! DIMENSIONS REAF CLEVIS AORE .Dd9 I NUMEER BORE CDP.3A 50 40. 50. 63 0.47 2 . 1 9 1.47 0 . 1 6 0 . 1 2 (55.5) (47.s) l4) (3) 63 0.63 ! !!

80

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

Clean Gas Filter

Rc TSJ URJ SFB31: Only 5 is selectable.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

chamfer. +5 0 +5 0 Note) For single vane type, rotation tolerance of 90, 180, and 270 actuators will be for size 10 actuators only.

LVQ

LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

AC Servo Motor Driver (CC-Link Type)

Parameter list (Driver side) . 17 5.

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Note 5) Refer to page 26 for auto switch mounting positions and mounting height. A 47 58 B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 Bore size (mm) 40 50 18 Series RSG Rod End Configuration Non-rotating Type Basic type/Flange mounting These drawings (2 items) show the piston rod extended. RSG-K Bore size: 40, 50 Direction of work piece conveyance (26 + Stroke) M4.5 x 5 Stroke 60 25 Approx.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

q"s

E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

ITV

75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

CU

K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.

MX-OMP0051

MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

1 5 20 1 5 1 0 25 20 1 5 30 25 25 2.

MHF2

depth 4 Attachment mounting thread Auto Switch Mounting Groove Dimensions 20 43 2.2 2-3H9 +0.025 0 depth 3 4 15 5 15 5 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 52 12-3-18 19 Series MHF2 Low Profile Air Gripper Dimensions MHF2-16D1 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK

MHF2

Dimensions 20 43 2.2 2-3H9 +0.025 0 depth 3 4 15 5 15 5 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 52 12-3-18 19 Series MHF2 Low Profile Air Gripper Dimensions MHF2-16D1 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

CEx-OMQ0010

a0~60 b25~85%RH c d e 5. f g. h i 6. j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

Multistage Ejector (N)ZL Series

50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120