VT325 state, keep the button pushed down and turn it approximately 90 clockwise. 4-7-18 3 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT325 How to Wire DIN Terminal Precautions 1.
5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.
TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D
ONOFF (31 ) ON OFF 31 61 61 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMS0006CN-G NPN () () ON ON 0 31 ON-OFF ON ( )(P1L~P1H) ON (31 ) () "digit" () 0 () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMS0006CN-G ON ( )(n1L~n1H) ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 () () F () ripple -13No.PS-OMS0006CN-G (3X8L(2 ) 0.50.05 Nm ,, A
Couplers that can be used with low vacuum
・KK/KKH Series
KK2: -100 kPa to 1 MPa
KK3: -90 kPa to 1 MPa
・KKH Series
KKH3: -90 kPa to 1 MPa
・KA Series
KKA3: -100 kPa to 1 MPa
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.6, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.6, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.6, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating
Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Not Provided, Allowable Kinetic Energy(J): 0.811, Operating