Size/Port: 53 [Male Thread Type, Port Size: R1/4, Flow: 130 L/min (ANR)]

Size/Port: 52 [Male Thread Type, Port Size: R1/8, Flow: 130 L/min (ANR)]

accuracy [mm] Note 5)Finger backlash/ both sides [mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ322252 to 130

Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc.PFA0 (atmospheric pressure) to 0.35 MPa1/2andquot; x 3/8andquot;50 to 95 F (10 to 35C) (no condensation)FEP, Stainless steel 304, Stainless steel 31673 psi (0.5 MPa)IN/OUT: FEP tube 3/8andquot; x 1/4andquot;1.3 to 2.6 gpm (5 to 10 L/min)Temperature: 50 to 95F (10 to 35C), Humidity: 35 to 80%RH (no condensation)W5.1 (130

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130

Escapements Series MIW/MIS

Outputs Operating pressure MPa Unit: N Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 34 23 OUT 45 57 68 79 113 12 6 26 17 IN 34 43 51 60 85 94 63 OUT 126 157 188 220 314 20 10 71 47 IN 94 118 142 165 236 Weights Unit: g Increase by stroke adjuster Stroke mm Weight g Increase by scraper Model Model 12 240 10 5 MIW12-12D MIW 20 650 30 10 MIW20-20D 10 130

Precision Cylinder Series MTS

SMTS20, #3 7 Precision Cylinder Series MTS Dimensions/25 MTS25 Basic type 12 10 53.5 51.5 2-cushion needle Width across flats 11 7.5 6 Rod cross section 7 6 2-M5 x 0.8 (port size) 28 0.2 16.5 15 M6 x 1.0 4.5 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130

Series AS-FM/AS-M/ASD-FM

Symbol 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" Inch size 12 7 Flow rate l/min (ANR) 38 Controlled flow 0.2 0.1 Effective area mm 0.6 100 Flow rate l/min (ANR) 460 230 290 130 Free flow Effective area mm 1.5 7 3.5 4.5 2 Note) The flow rate value is at a pressure of 0.5MPa and temperature of 20C. 9 Series AS-FM How to Order 200 1 F M 06 AS Applicable tube outside diameter Metric size Body size

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

unit Key switches Cable length 2m Basic performance Performance/Specifications LC6C-220AD Applicable controller Operating temperature range 5 to 40C Communication method Conforming to RS485 Parameter change, JOG operation, alarm reset, teaching, test Functions Protective function indication Alarm code Dimensions POWER ALM PARA AL-RES JOG MON TEACH I/O TEST STOP SMC LC5-1-T1 TEACHING BOX 130

Positioning Driver Series LC6C

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21

3 Way Direct Acting NVKF 300 Series

Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I (0-0.7 MPa) o.25 n 1 < 1/8 NPTF u.zt ir5 0.271 lbs (120 sf) NVKF334Y lLow waltaoe: 2WDC) NVKF334V lVacuum) '1 Torr-100 PSI (-100 KPa-0.7 [,lPa) NVKF334W ilow waltaoe + Vacuuml Basg mounted 1 1 0V 50/60 HZ, 220v 51 er,t1z, 1 00v 50/6o HZ, 2o0v 59 @lz 130

Air Pilot Operated Series NVSA

NXT 333-17-5 B D lt J K tl 5.12 {130) 1.95 (4e.5) 1.99 (50.s) '|.52 (38.5) 1.44 (37.5) 1 . 1 0 (2Bl 1.06 l27l 0,63 (16) 1.42 (36) 0,91 (23) 0.61 irs.5) 1.26 (32) 13 Gasket Subplate Buna N AxT 33$ 12.2 l 4 Cushion . "8" End AXT 334.5 Millltute.s in Parenlheos r0 DIRECTIONAL AIR VALVE DIMENSIONS PARTS LIST nrr.*.t.*,. SERIES NVSA 4&14 DETAIL REF, OESCBIPTION TMTERIAL PAFT NO. Body Alum.

3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87 (22) Nclise L.evel Construction/Dimensions (mm) 130

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Stopper Cylinder Adjustable Mounting Height Type Series RSG

RSG-R Bore size: 40, 50 Direction of work piece conveyance (51 + Stroke) M45 x 1.5 24 Stroke 60 25 A 4-9 through Stroke 130 + 2 Strokes 67 + Stroke Approx. B Integrated One-touch fitting type QB Piping tube O.D. QA Stroke Approx. QV mm Note 1) Body dimensions when not equipped with auto switches are the same as in the drawings above.

Compact Electro-pneumatic Regulator Series ITV0000

For IITV00-n Total weight (g) Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g) of DIN rail Note 2) Specifications other than the following are optional. Pressure range: 0.1MPa, 0.5MPa, 0.9MPa, Power supply voltage: 24VDC, Input signal: 0 to 10VDC Note 3) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions.

Vacuum Regulator Series IRV

15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60 50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130

FEP Tubing (Fluoropolymer) Series TH

Min. bending radius (mm) 15 Note 3) Note 4) 20 35 60 95 100 130 Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature 2R Material FEP (Fluorinated Ethylene Propylene Resin) At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameter's rate of change is 5%.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 111 103 89 6 130