Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

OMR0031

100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel distance [mm] Total travel distance [mm] 36 - (2) Speed entry method Settings: Target position [mm], Speed [mm/s], Acceleration [mm/s2], Deceleration [mm/s2], Load mass [g] To obtain the total travel distance S [mm] in absolute Acceleration Aa Speed Vc Speed [mm/s] positioning

F

3.5 8 14 KQU08-U02 17 15.2 52 15.2 46 18.5 25.6 1/4 1/8 KQU07-U01 14.29 13.2 44.5 13.2 40.5 17 4.6 8 38 KQU08-U03 17 15.2 51.5 15.2 45.5 18.5 25.6 1/4 1/4 KQU07-U02 14.29 13.2 46 13.2 40 17 4.6 10 14 KQU10-U02 19 18.5 57.5 18.5 51.5 21 40 1/4 3/8 KQU07-U03 17.46 13.2 46.5 13.2 40.5 17 4.6 10 38 KQU10-U03 19 18.5 57.5 18.5 51.5 21 40 5/16 1/8 KQU09-U03 17.46 15.2 50.5 15.2 46.5 18.5 6 10

Peltier-type Chiller Thermo-con/ Compact Type

50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

PF-OMN0011_C

5% ON OFF [F 2] OUT2 34 () ( ) ON OFF 50% 5% OUT1 -23No.PF-OMN0011CN-C [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81] 50 OFF [F82] 51 [*] [F90] 52 OFF [F96] 53 () [F97] 54 OFF [F98] 57 OFF [F99] 58 OFF 30 [F10](41 ) (4 L/min ) OUT1 OUT1 OFF OUT2 -24No.PF-OMN0011CN-C [F 0] 2 [F 0] [RANGE] [F 0] -25No.PF-OMN0011CN-C [F

Shot Pin Cylinder

95 + Stroke 40 + Stroke 0.05 24.8 40 0.1 25 View A-A 50 100 (119.3) 11 0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80

Process Valve

/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/12850 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Dimensions: 10 16 17+ST 4 x M3 x 0.5 thread depth 4.5 3.5 8 7.5 2 x M5 x 0.8 thread depth 4 (Piping port) 21 8 Steel ball 34 M3 x 0.5

STAINLESS STEEL CYLINDER

Table 1 Tightening torque ( Unit: Nm ) Foot Flange Plug bolt Cushion valve Cushion valve (Lock nut) Bore size (mm) (Valve retainer) 20 1.5 2.0 0.5 25 2.9 2.0 0.5 32 2.9 2.0 0.5 40 4.9 2.0 0.5 50 11.8 5.0 1.0 63 24.5 5.0 1.0 80 24.5 20.0 2.0 100 42.2 20.0 2.0 6.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2 25 4 x M8 x 1.25 Effective thread

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

PF3W7x.eng

Ensure the piping cools sufficiently before touching. 50% of maximum rated flow [ 50] 50 oC (for all ranges) [ tn_2] Set value (OUT2) Pin number of the connector (On the lead wire) 90o End stop position 0% of maximum rated flow [ 5] 5 oC (for all ranges) [ tH_2] Hysteresis (OUT2) After maintenance is complete, perform appropriate functional inspections and leak tests.

ZSE F/ISE

The data set by auto preset function is fine turned. 16-2-40 17 Series ZSE 50 60F/ISE 50 60 High Precision, Digital Pressure Switch for General Fluids Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Initial setting 1. Initial setting mode 2. OUT1 output mode selection 3. OUT2 output mode selection SET ZSE ISE Press the SET button. PSE Press the SET button at least 2 seconds.

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

CU

K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.