Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Valve stations: 2 to 20 , One-touch fittings available, MANFLD 12-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MK, VV4/5Z* BASE MT Weight: tab 9 .69830 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, R/C MFLD, 4-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9 .44000

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, 3-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9 .51645

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 13-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, 2J, VV4/5Z* NO SIZE RATING, 1.64830 lb

Body ported, base mounted manifolds – old style See replacement series SS5YJ5 – New Style , Manifold style:   single base/B mount , Thread type:   North American , Valve stations:   2 to 20 , One-touch fittings available, MANIFOLD, NVZ 3-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, 2J, VV4/5Z* NO SIZE RATING, 0.539 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 4-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, NJ, VV4/5Z* BASE MT 1/8, .68420 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 6-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, NJ, VV4/5Z* BASE MT 1/8, .88880 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD, NVZ3000, 4-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 4-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, 2J, VV4/5Z* NO SIZE RATING, .64020 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 4-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, NJ, VV4/5Z* BASE MT 1/8, .34540 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD., NVZ3000 6-STA. *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, 2J, VV4/5Z* NO SIZE RATING, .50600 lb

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Short Stroke Electric Actuator Series LX

distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7 0.2 0.1 Refer to page 303 for acceleration time. 213 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Ball Screw Series LXF Without Motor Brake 8mm/6mm lead How to Order LXFH5

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size TC TDH10 TH TK TN TT TU TV TW TX TY TZ CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 CJ-T010C 10 4.5 3.3+0.048 0 29 18 3.1 2 9 40 22 32 12 8 CJ-T016C 16 5.5 5+0.048 0 35 20 6.4 2.3 14 48 28 38 16 10 * A T-bracket includes a T-bracket base, single knuckle joint, hexagon socket head bolt and spring washer. * For dimensions of (U) and (S + Stroke), refer to the double

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 11 Series XMH, XYH Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature C 5 to 150 Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 5 14 45 80 1.3 x 10-10{1 x 10

XM, XY

FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

Series VCL

81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.