Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 12VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Manually Operated, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 12VDC, Lead Wire: M Plug w/o Connector, Surge Suppressor: None, Manual Override: Manually Operated, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 12VDC, Lead Wire: M Plug w/o Connector, Surge Suppressor: None, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: L Plug w/o Connector, Surge Suppressor: None, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: Manually Operated, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 12VDC, Lead Wire: L Plug w/o Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 6VDC, Lead Wire: M Plug w/o Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 12VDC, Lead Wire: M Plug w/o Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector w/o Cable, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 5VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M Plug Connector w/o Lead Wire, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/o Lead Wire, Surge Suppressor: None, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: F (Bracket)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 1 (100VAC 50/60HZ), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: None, Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: F (Bracket)
AU AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Move the piston to the stroke end of the side that will be filled with oil, and perform steps q through r in the same sequence as described above. MK/MK2 Environment UAvoid use near fire. UDon't use in the clean room. RSQ/RSG Mounting RSH UInstall the converter vertically. UInstall the converter at a position that is higher than the cylinder.
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
Connecting thread IN 1 OUT 2 2 OUT 01 male thread, M5 female thread 8 1 Thread type Nil N Rc NPT Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side. Note) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown.
GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.