240 10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L
pilot solenoid: VEX3422 41 19 3 x 1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] 3 R 1 P 17.5 39.5 Sol.b A B 65 55 45 Sol.a 5 69 121.9 112.1 104.9 M plug connector (Light/surge voltage suppressor) Grommet L plug connector Manual override + + 85.2 73.9 72.8 54.6 P2 P1 A 2 M5 (Port PE/ Pilot exhaust) 37 17.5 17.5 79 39.5 VEX3420: 1/8 Plug VEX3421: 1/8 VEX3422: 1/8 Plug (Port P1/Pilot air) 10.5 Silencer
x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25
(mm) M10 x 1.25 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M4 x 0.7 Piston rod thread Port size G 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 G 1/8 M5 x 0.8 Action Double acting, Single/Double rod Rubber cushion/Single rod Fluid Air Proof pressure 1.5 MPa CJ1 Max. operating pressure 1.0 MPa Spring return 0.05 MPa 0.05 MPa Min. operating pressure CJP 0.1 MPa 0.08 MPa Spring extended 0.08 MPa Air cushion/Single rod
L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions
30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1
Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.
0 @1 Stopper Resin !1 Replacement Parts Cover !
side: Orange 2(B) port side: Green 12.3 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 58.4 E 4 A 3/5 3/5 E 4 A 4 A 4 A 82.7 101.2 77.3 2 B 2 B 2 B 2 B 63.8 P 1 P 1 5 5 3 E 1 P 3 E 1 P 12 1 1 1 1 Individual SUP spacer (For DIN rail mounting) (10) Individual EXH spacer 14.7 L Dimension n: Stations L n 2 185.5
8 88 64 62 62 6 6 5 8 8 8 26-0.033 0 11 8 8 16 13 13 1/4 1/8 1/8 26-0.033 0 32-0.039 0 8 10 M32 x 2 Axial Foot (L): 1011-CM2WL, 2122-CM2WL Standard port Relief port (10-, 21-) Vacuum port (11-, 22-) K H1 AL A H G H2 F 2 x P (Rc, NPT, G) K H + Stroke F G AL A 2 x NN 2 x M5 x 0.8 B LH Width across flats B1 (This drawing shows the cases of 20 and 25.)
distance + Stroke L (mm) 10 100 Eccentric distance + Stroke L (mm) m l S l : Eccentric distance (mm) S: Stroke (mm) Allowable Kinetic Energy L Extension Locking, Without Cushion Retraction Locking, Without Cushion Pneumatic Circuit 200 200 Warning 1.
Applicable load Lead wire length (m) Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Grommet Reed auto switch Yes 12 V 24 V 2-wire Note 1) Lead wire length symbols: 0.5 m Nil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ
12 50 F9N S L AS Air Slide Table Symmetric type Number of auto switches 2 pcs. 1 pc. n pcs.
3 o @1 @0 !1 !0 !2 r w i e !5 !9 y u t MDHR3 !4 !3 q !1 @0 @1 w o e i MHZ2 !5 MHZJ2 MHQ r !7 !6 t !0 !8 !2 i !9 y u MHL2 Component Parts Component Parts MHR No. !2 !3 !4 !5 !6 !7 !8 !
Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct
Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .
x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer
(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.