MGC

2 !3 !4 !5 !6 !7 !8 No.

3 Position Cylinder Series RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Barrier 52-SY7000 Without barrier Z728.H MTL728P+ KFD0-SD2-Ex1.1065 Nil A B F Note) One barrier per solenoid supplied.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U H with effective thread depth C 4-N through hole 8-O counter bore F F I 26 13 Connector auto switch 20 (22) D D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M E J S B + Stroke L + Stroke L A + 2 strokes Note) The drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

One-touch Fittings

[mm] 1 D Weight [g] Nylon Urethane X 4 M5 x 0.8 KQ2U04-M5G 10 8.2 7.7 33.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 1.8 6.7 6 M5 x 0.8 KQ2U06-M5G 12 10.4 9.7 35 32 13.3 10.4 6.8 6 3.2 2.2 2.2 1.8 10 D Round type 4, 6 M 1: D is maximum diameter. 2 x N Release button dimensions A L 2 x O X D H Connection thread Q Q Branch Y: KQ2U-G (Sealant) Connection thread R Model H (Width across flats) 2 x Applicable

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

MLGC

Bore size Bore size MLGCl RSMLGC , #2 (#1+#2+#4) 3.2-8 Series MLGC Auto Switch Specifications Refer to p.5.3-2 for further information on auto switch single body.

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

ML1

2 !3 !4 !5 !6 !7 !8 !

AS-FPQ/AS-FPG

2 O-ring NBR NBR !3 O-ring NBR NBR !4 Gasket NBR, Stainless steel 304 NBR, Stainless steel 304 !5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

WRF100

x M12 x 1.75 depth 24 4 x M8 x 1.25 depth 12 15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1

Soft Start-up Valve

gauge (Option) C B 2(A) 1(P) 37.5 Bracket (Option) T N M P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

x 0.8 thread depth 8.5 45 38 3.5 50 3H9 (+0.025 0 ) depth 3 [Origin]4 Origin3 (56) [54]4 Stroke 54 [(56)]4 (52) 10 A (Table traveling distance)2 52 (115.5) 65 L Cable length 250 Auto switch groove (1 row per side) 58 38 24 (4) [2]4 2 [(4)]4 (57.5) 6.5 24 Motor cable 6 48 38.5 (2.4) M4 x 0.7 thread depth 8 (F.G. terminal) 120 D x 120 (= E) B F 10 3H9 (+0.025 0 ) depth 35 n x 4.5 48 5 4 3H9