Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note

Drain Separator for Vacuum Series AMJ

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil Rc J ZY 03 3/8 Flow: Right Left F G R 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note 5)

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

S

(Station 8) Type of actuation Voltage: 24VDC SS0751-08C4C8SDQ2 S0711-5 S0721-5 S07A1-5 SS0700-10A-3 Specifications Symbol Function 1 2 2-position single Specifications Symbol 2-position double Nil R Standard External pilot Note) Write sequentially from the 1st station on the D side.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

IR30-OM00013

3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

PSxx-OMR0001CN

(10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4 0.4MPapsi 0.4MPapsi 10 5 N 1 2 3 4 5 6 1 2 NPN1 PNP1 P 10 6 3 4 0.2MPapsi 0.2MPapsi 7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R

PSxx-OMT0001CN

(10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4 0.4MPapsi 0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Ambient Dryer Series AMG

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

Steam Valve

Symbol Graph (1) VND 02 D Pilot Pressure (N.O. type) Valve type Valve size N.C. N.O.

CLQ

Component Parts No. q w e r t No. !7 !8 !

EX600-WEN_WSV.eng

Poloneza 89, 02-826 Warszawa, Poland Red LED is ON. Non-restorable error is detected. (e.g. Hardware failure) (1) Set the number of occupied I/O points for the module and each parameter of the "remote". PORTUGAL (351) 21 472 45 00 OFF No remote connected. Refer to the LED Display.

EXxx-OMV0028.eng

Poloneza 89, 02-826 Warszawa, Poland Troubleshooting Green LED is ON. Remote is normal. (1) Set the number of occupied I/O points for the module and each parameter of the "remote". Restorable error is detected. (LED flashes when more than one diagnostic information item is detected.)

HRX-OM-M005

Alarm1 Water Leak Detect FLT 01 Alarm2*1 02 Alarm3 RFGT High Press FLT 03 Alarm4*1 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb