3 Way,3 Port Solenoid Valve NVZ Series A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
100 100 50 50 0 0 0 5 m/s m/s 19 4-3.
Body Size: 3, Thread: Rc, Port Size: 03 (3/8), Handle/Bonnet Material: A (Flame Resistant PBT), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)
Body Size: 3, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: A (Flame Resistant PBT), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)
Body Size: 3, Thread: Rc, Port Size: 03 (3/8), Handle/Bonnet Material: B (Aluminum), Options: B (w/Bracket), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)
Body Size: 3, Thread: F (G), Port Size: 03 (3/8), Handle/Bonnet Material: B (Aluminum), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)
Body Size: 3, Thread: G, Port Size: 3/8, Handle/Bonnet Material: Aluminum, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red
Body Size: 3, Thread: Rc, Port Size: 3/8, Handle/Bonnet Material: Flame Resistant PBT, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red
Body Size: 3, Thread: Rc, Port Size: 1/4, Handle/Bonnet Material: Flame Resistant PBT, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red
With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
110 -10 Pam 3/s A B C 0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.
U Connector type I 13 Connector auto switch 26 20 (22) D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M L B + Stroke A + Stroke E J S Note) This drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.
Z (Example) A80CZ 3 m . L (Example) A80CL None .
Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .
Z (Example) F9NWZ Bore sizes 32 to 100 Lead wire length (m) Auto switch type Type Special function Load voltage Indicator light Electrical entry Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) Electrical entry direction Applicable load DC AC Perpendicular Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV In-line Z76 Z73 Z80 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y7BA 3-wire (NPN equiv.)
(Example) Nil Lead wire length 0.5 m 3 m L 5 m Z None N Applicable for the connector type (D-C) only. Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-A73(C)(H)/A80C Solid state switch: Manufactured upon receipt of order as standard.
in X, Y, Z directions, 2 hours each 490m/s in X, Y, Z directions, 3 times each 290g (without lead wire) 250g (without lead wire) Equivalent to IP65 3/8 1/2 1/8, 1/4 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]