Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 13 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation