MNB

Rod side flange style (F): MNBWF Rc 1/8 BC element Rc P Rod side cylinder port GA GC GD Rc BP unlocking port W GR GL GL1 Rc P Head side cylinder port GE B B2 H A S + Stroke H + Stroke A K AL C 4-FD K F GF BN Width across flats B1 4-J Cushion valve GB Effective thread length MM H1 V Q Fd E D D FY B MM Width across flats F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective

MNB

GE MNB K F A BN A H S + Stroke ZZ + 2 strokes H + Stroke CNA CNS CLS CLQ e e MLGP 13 13 RLQ 9 f f l + Stroke 9 l h h + Stroke MLU ZZ + 2 strokes ML1C With rod boot D-X Bore size (mm) Stroke range (mm) Effective thread length (mm) Width across flats GL1 A B B1 H1 B2 BN BP C D Ee11 F GA GB GC GD GL 2032 40 50 63 80 100 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 Up to 500 Up to

MNB

C E D GL W GL 1 T MA 4-J 4-J MB V Effective thread length H1 MA VA Q GF N F GE Effective thread length K F A A BN K H + Stroke H S + Stroke ZZ + 2 strokes e e 13 13 l + Stroke 9 f f l 9 h h + Stroke ZZ + 2 strokes With rod boot (mm) Width across flats Bore size (mm) Stroke range (mm) Effective thread length (mm) BP GL1 A B B1 H1 B2 BN C D Ee11 F GA GB GC GD GL 32 40 50 63 80 100 to 500 to

PF-OMM0004_C

(60)[F 2]OUT2(36) -24No.PF-OMM0004-D 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(60)[F 2]OUT2(36) 30 (26) -25No.PF-OMM0004-D 2 [F 1] [F] 2 [F 1] OUT1 60 ON OFF 50% 5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*]

LFE-OMY0008

*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

I

++t&F Eft!

PSxx-OME0003CN

No.PS-OME0003CN-F

HRS100/150

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat

51

Head Flange: CG3GN Bore size Stroke With rubber bumper Width across flats KA GA GB 4 x FD 8 x J 2 x P F R0.5 H1 0 E 0.05 MM D FX 0.15 0 E 0.05 I B C Corner of the cover (20 to 63) H A AL Width across flats B1 Width across flats NA F FT C FX 0.15 S + Stroke ZZ + Stroke B End boss is machined on the flange for E.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

IDU/IDF

22 Accessories (Options) Base Integrated with Transformer Dryer Transformer E F D C A Part No.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

ZISE20A.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZISE20B.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZISE40A.eng

ON: Green OFF: Red [F 2] Setting of OUT2 Same setting as [F 1] OUT1. At the output mode, Error detection mode can be selected. Display color is linked to the setting of OUT1, and can not be selected.

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

ZISE20B-L.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZQ

above dimensions are for ZQ11U-J2 L-F.

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

DOC1003626

Field name Example RTU mode ASCII mode (HEX) character data binary data Header : None Device address 0x01 0,1 0x01 Function 0x04 0,4 0x04 Quantity of bytes to read 0x02 0,2 0x02 Information of 0009h(Data display 1) 0x00FA 0,0,F,A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 * Response message at an ambient temperature of 25.0C 3.13 Register