Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

pilot) -100kPa to 0.7MPa (external pilot, pilot pressure range) 0.25 - 0.7MPa , Effective area mm 2 (Cv): body ported 10.6 (0.59); base mounted 12.6 (0.7) , Coil rated voltage: 3, 5, 6, 12, 24VDC; 100, 110, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, 141

The ZK2 also has various mounting options to choose from.Stations: 1 to 10, Wiring Type: D-sub connector, flat ribbon cable, individual wiring , Exhaust Type: Silencer, common exhaust; individual port exhaust, Manifold, 5 stations, VACUUM EJECTOR, 141 lb

The ZK2 also has various mounting options to choose from.Stations: 1 to 10, Wiring Type: D-sub connector, flat ribbon cable, individual wiring , Exhaust Type: Silencer, common exhaust; individual port exhaust, Manifold, 5 stations, VACUUM EJECTOR, 141 lb

The ZK2 also has various mounting options to choose from.Stations: 1 to 10, Wiring Type: D-sub connector, flat ribbon cable, individual wiring , Exhaust Type: Silencer, common exhaust; individual port exhaust, Manifold, 5 stations, VACUUM EJECTOR, 141 lb

Exhaust air cleanliness: equivalent to class 100 , Worry free two stage element construction , With indicator function , Silencing effect: 40 dB (A) or more , Double packaging, EXHAUST CLEANER, CLEAN ROOM, EXHAUST CLEANER FOR CLEAN ROOM, 141, 1.15 lb

AIR CYLINDER

Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301 267 330 Foot: 231 207 253 L G 193 172 212 144 126 156 109 94 118 90 78 97 Rod side Frang e F Head side flange 433 386 476 Foot: 334 297 367 L G 281 250 309 210 185 229 160 141

CEx-OMQ0011

(ON ON ON (LED)No.10() Err9 (P3)(P2) () Err9 Err9 ON ON ON ()5mm Err5 5mm 1 Err10: Err11 CPU Err12 ON 13-2 () 200 200 ( 6) 57 *200.0 PRG STEP P6 200.0 200 200 300mm/sec 50% 35% 58 141 No. No.

MHx-OMY0005

MHF2-8D MHF2-12D MHF2-16D MHF2-20D mm 8 12 16 20 MPa 0.150.7 0.10.7 oC -1060 mm 1) 0.05 120 c.p.m. 120 60 2) 1 N 19 48 90 141 8 12 16 20 () mm 16 24 32 40 32 48 64 80 65 155 350 645 85 190 445 850 3) g 120 275 650 1,225 1) 0.15mm 2) 0.5MPaL=20mm 3) 4 2 2-1 1. ( ) 2. 3. 4. 2-2. 1. 2. (1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7.

LEF-OM002xx

)Ball screw+BeltLEFS40L/R Guide type Linear Guide 5 to 40 Operating temperature range [] 90 or less(No condensation) Operating humidity range [%RH] Motor size 56.4 Electric specifications Motor type Step motor(Servo 24V DC) Encoder Incremental A/Bphase (800 pulse/rotation) 24 VDC10% Rated voltage [V] 100 Power consumption [W] note5) 43 Standby power consumption when operating [W] note6) 141

LEF-OM006xx

16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900), (1000) 50 60 (kg) ) 23 (mm/s) 2) 20500 10250 (mm/s 2) 3,000 (mm) 0.02 (mm) 20 10 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 56.4 (DC24V) A/B 800 / (V) DC2410% (W) 4) 100 (W) 5) 43 (W) 6) 141

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Vibration resistancem/s2*7 50/20 Actuation type Ball screwBeltTop mounting, Ball screwIn-line Guide type Sliding bearing Operating temperature range 5 to 40 Operating humidity rangeRH 90 or less (No condensation) Motor size 42 56.4 56.4 specifications Motor type Battery-less absolute Step motor 24VDC Electric Encoder Battery-less absolute Rated voltageV 24VDC10 PowerW*8 Max.126 Max.159 Max.141

JXCx-OMU0004

300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 56 No.JXC-OMU0004-A 10.4 LEYLEYG LEYLEYG LEYLEYG [mm/s] 20 2] 1000 [mm/s [mm/s] 10 2] 1000 [mm/s [mm] 1 3 LEY16LEYG16 LEY25LEYG25 LEY32LEYG32 LEY40LEYG40 A B C A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182 342 134. 263 501. 218 425 814 5 5 [N] 38 74 141

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

24 16 8 30 20 10 Impact/Vibration resistance [m/s2] *3 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor size 42 56.4 28 specification Motor type Battery-less AbsoluteStep Motor 24VDC Encoder Battery-less Absolute Power supply voltage [V] 24VDC10% Power [W] *4 Max. 57 Max. 51 Max. 123 Max. 141

Air cylinder

483 Head L Foot: side Frang flange e F 0.5 231 207 253 248 284 354 371 L G F 0.7 193 172 212 208 239 297 311 0.3 144 126 156 154 177 220 230 0.5 109 94 118 116 134 167 174 G 0.7 90 78 97 96 111 138 144 Rod side 0.3 433 386 476 462 528 655 688 Head L Foot: side Frang flange e F 0.5 334 297 367 355 406 505 530 L G F 0.7 281 250 309 299 342 425 446 0.3 210 185 229 223 256 317 332 0.5 160 141

Programless controller Step motor (servo 24 VDC)

LEY16 / LEYG16 LEY25 / LEYG25 LEY32 / LEYG32 LEY40 / LEYG40 A B C A B C A B C A B C Low 14 27 51 63 126 232 80 156 296 156 298 570 Pushing force [N] Middle 26 50.5 96 92.5 182 342 134.5 263 501.5 218 425 814 High 38 74 141 122 238 452 189 370 707 283 553 1058 Pushing speed [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 Pushing force accuracy is 20%F.S.

MHF2-E

Middle stroke 120 Long stroke 60 Lubrication Not required Action Double acting Note 2) Gripping force Effective gripping force per finger (N) 19 48 90 141 Short stroke 8 12 16 20 Opening/closing stroke (Both sides) (mm) Middle stroke 16 24 32 40 Long stroke 32 48 64 80 Short stroke 65 155 350 645 Note 3) Weight (g) Middle stroke 85 190 445 850 Long stroke 120 275 650 1,225 Note1) This is

1.63

(N) MGC Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Symbol Description Bore size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Side porting type -X867 MGF OUT 314 63 94 126 157 188 220 251 283 314 Made to Order (For details, refer to pages 1247 to 1440.) 20 10 IN 236 47 71 94 118 141 165 188 212 236 MGZ OUT 491 98 147 196 245 295 344 393 442 491 25 10 Symbol Description

MHF2

Double piston construction achieves compact design with strong gripping force. q r Mounting is possible from 4 directions. e w Model Bore size Gripping force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 12-3-3 4 Series MHF2 Model Selection Model Selection Selection Procedure Confirm gripping force Confirm

MU

, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141