Body Size: 20, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 01 (1/8), OUT Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 01 (1/8), OUT Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 01 (1/8), OUT Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

VER2000/4000

VER VEA 5 (R1) 4 (A) 1 (P) 2 (B) VY2 OFF state VBA VBAT F1 < F2 condition: See figure q. 2 (B) 3 (R2) AP100 4 (A) ON state Immediately after turning on F1 > F2: See figure e.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 1 8 01 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 1 4 10-SY7000 02 02 03 2 position

KP

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

VEX1

Lead wire length 300 mm) Grommet (Lead wire length 600 mm) DIN terminal DIN terminal (Without connector) Nil Without sub-plate H D DO 2 01 1 8 1 8 Base mounted 02 1 4 1 4 Caution Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions.

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

Series VV100 /D-sub Connector 3 Port Solenoid Valve Plug-in Connector Type Manifold

If the mounted valve is N.O., apply pressure to the 3(E) port and exhaust air from the 1(P) port. 4

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

AMX-OM-Q018E

For low dew point air, use stainless steel or fluoropolymer piping. e. Installation of Differential Pressure Gauge Please attach by a customer.

Activated Carbon Filter

P A B C D E G J M N Q R S T U V AMK20 1/81/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30 1/43/8 53 167 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 AMK40 1/43/81/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 semi-standard bowl Semi-standard specifications Model Metal bowl No.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

VMx-OMP0001

Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

SI unit for CC-Link

An example of when the SI unit station number is set to 01 is shown below.

EXxx-OMP0004CN

-14No.EX-OMP0004CN-I D 3 -15No.EX-OMP0004CN-I LED LED LED L ERR L RUN PWR ON OFF PWR(V) ON OFF -16No.EX-OMP0004CN-I DIP (0.2 Nm) -17No.EX-OMP0004CN-I 5 L ERRLED 00 65 L ERRLED HOLD/CLEAR HOLD/CLEAR No.1 HOLD ON CLEAR OFF No.2 ON 110 OFF -18No.EX-OMP0004CN-I EX260-SMJI/O (1 32 /32 ) SI [01] QJ61BT11N EX260-SMJ1/2 I/O (1 ) (RY) (RX) (RX) (RY) E0H RX0FRX00

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

Body Ported RoHS How to Order Valve VF 3 1 3 0 5 G 1 01 Body ported Series 1 3 5 Bracket VF1000 VF3000 VF5000 Type of actuation Nil F Without bracket With bracket Thread type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center Rc G NPT NPTF Nil F N T VF1000/3000 Single type (The bracket cannot be connected after delivered