CM2

13 18 34 8 5 15.5 13 26 30 5 8 28 M8 x 1.25 15 24 M20 x 1.5 1/8 20 25 45 8 75 60 4 7 13 22 40 10 5.5 19.5 17 32 37 6 8 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 26 0 0.033 32 45 8 75 60 4 7 13 22 40 12 5.5 19.5 17 32 37 6 8 37.5 M10 x 1.25 15 34.5 M26 x 1.5 1/8 26 0 0.039 40 50 11 82 36 66 5 7 16 24 52 14 7 21 22 41 47.3 8 10 46.5 M14 x 1.5 21.5 42.5 M32 x 2 1/4 32 Dimensions by Stroke Built-in

Compact Cylinder Series CQS

6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 3 DI2 1 0 1 Program No. 6 DI-1 1 1 0 Program No. 7 1 1 1 Program No. 8 Note. 0: off 1: on Program input 1 PI1 Turn PI1 on to resume the step stopped by the SINK (1) command in the program.

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

Rotary Table/

7 !8 !1 @1 !2 q @0 u !

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Valve output 14 RXn.F RYn.F Valve output 15 Unit No.0 Reserve RX(n+1).0 RY(n+1).0 Valve output 16 EX600-SCF1 RX(n+1).1 RY(n+1).1 Valve output 17 RX(n+1).2 RY(n+1).2 Valve output 18 RX(n+1).3 RY(n+1).3 Valve output 19 RX(n+1).4 RY(n+1).4 Valve output 20 RX(n+1).5 RY(n+1).5 Valve output 21 RX(n+1).6 RY(n+1).6 Valve output 22 RX(n+1).7 RY(n+1).7 Valve output 23 RX(n+1).8 RY(n+1).8 Valve output

Air Cylinder CP Series Cylinder Positioner Assembly

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

Dual Rod Cylinder Series CXSJ/CXS

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 r !9 !8 @2 !6 @9 !7 o i @4 @5 !8 r !9 @2 !6 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts: Standard Piping No. Description No.

Modular/F.R.L. Units Series AC

1/4 GaugePort D 40 53 70 Q 44 46 54 L 30 41 50 V 55 53 70 J 157(max.160) 218(max.221) 255(max.259) K 52 59 75 U 34 40 54 A NPT 1/4 NPT 3/8 NPT 1/2 W 2.3 2.3 2.3 X M28 X 1 M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 28.5 38.5 42.5 T 15.4 8 10.5 E 30 38 F 70(max.73) 83(max.86) 88(max.92) Z 6 7 7 AA 14 19 21 Y 30 31 35.5 H 5 3.5 1.5 S 5.4 6.5 8.5 AW20 AW30 AW40 Auto Drain mm Dimensions Model Port Size

VM

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23

Fieldbus system EtherNet/IP TM compatible SI Unit

(MSB-LSB) are selected. 1 Input data Output data Byte0 Hi byte DYB (Unit 1) Output 0 to 7 AXA channel 0 (Unit 0) Lo byte DYB (Unit 2) Output 0 to 7 Byte1 Byte2 Hi byte Output 0 to 7 AXA channel 1 (Unit 0) Lo byte Output 8 to 15 Byte3 SEN3 (Unit 5) Byte4 DXB (Unit 3) Input 0 to 7 Output 16 to 23 Byte5 Input 0 to 7 Output 24 to 31 Byte6 DXD (Unit 4) Input 8 to 15 Byte7 Padding data Total 8

24

7 !1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

HEC_001W-E

-7-7 7.6.1 SETTING MODE, LEVEL 1 -7-7 7.6.2 SETTING MODE, LEVEL 2 -7-9 7.6.3 SETTING MODE, LEVEL 3 -7-11 7.6.4 POWER SUPPLY OFF -7-11 8 ALARM -8-1 8.1 HOW TO IDENTIFY ALARM -8-1 8.2 ALARM INDICATION -8-2 8.3 HOW TO RESET ALARM -8-3 8.4 ALARM CODE LIST -8-3 8.5 TROUBLESHOOTING -8-5 9 APPENDIX -9-1 9.1 SIGNAL AND STYLE OF CONNECTORS -9-1 9.2 POWER SUPPLY CABLE -9-3 9.3 CALCULATION OF DEW POINT

MXQ

1 !2 !3 !4 !5 !6 !7 !8 !

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

Rotary Clamp Cylinders

7 !8 !6 !6 !0 !2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

Clamp Cylinder with Lock

1 @7 @0 #6 #5 $1 @6 r $2 #7 !7 #4 @8 !8 !9 #8 @2 #1 #2 y $0 #9 t @4 @3 @5 @1 !6 e !0 $3 i u w q Extension locking (F) #3 @9 #0 !3 $2 $4 !4 !5 o !1 @7 @0 #5 #6 $1 @6 r @2 #7 !7 #4 @8 !8 !9 #1 #2 !2 y $0 #9 t #8 w $6 $7 $5 !0 $3 q !6 i u e @4 @3 @5 @1 Description Component Parts No. No.

CJ2

1 !2 !3 !4 !5 !6 !7 !8 !

JIS Standard Hydraulic Cylinder

Refer to Best Pneumatics No. 2-1 for details. 361 CH2E/CH2F/CH2G/CH2H Series Construction @7 q y i @8 !4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

CNG

8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.