Air preparation filter

Piping port size Applicable body size Symbol Port size 70 80 90 10 1 14 1 1/2 20 2 -14- Doc. no. AMX-OMU0058-C 5. Component name and spare parts list Component parts No.

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

Digital Flow Switch (Integrated display type)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6

Air cylinder

L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.

Digital Flow Switch (Integrated display type)

Press the SET button between 2 to 5 seconds. Press the SET button for 5 seconds or longer.

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

LG1H

Nil W High rigidity direct acting guide H Axial F Cable entry direction Series Cable length Without coupling With coupling 20 21 2m 3m 4m 5m 2 3 4 5 Stroke Lead screw lead Motor specification 10mm 20mm A C Standard motor Matsushita Electric Industrial Co., Ltd.

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

High Power Cylinder:

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.

ZQ-OM01301

Note 2) (7) and (8) do not need to be selected. S Note 8) None Provided Note 6) The bracket is not included when 3M is selected for (2). Note 7) This option cannot be selected when 3M is selected for (2). Note 8) The check valve option cannot be selected when 1U is selected for (2) and J1 or J2 is selected for (3). Also select C in (4) for the manifold type. 5 - Doc. No.

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) Base mounted Body ported With Bracket Air operated valve type SYJA3 2-M3-F 1 2 JIS Symbol SYJA312 4 SYJA322 4 Pilot Pressure Range Caution (A) 2 (A) 2 For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Digital Flow Switch (Integrated display type)

Data stored every 5 minutes: 5 minutes x 1 million cycles = 5 million minutes = 9.5 years Data stored every 2 minutes: 2 minutes x 1 million cycles = 2 million minutes = 3.8 years If the accumulated flow external reset is repeatedly input, the life will be shorter than the calculated life. 4: Standard condition (ANR): Flow measurement reference condition 101.3 kPa, 20 C, 65%R.H.

IDX-OM-W017

3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

CUJ

5 5 18 M3 x 18L 3 Mini Free-mount Cylinder Series CUJ Clean Room Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil S 2 pcs. 1 pc.

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09

Single Axis Electric Actuator Serriies LJ1S Slider Guide

MR-JCCBL5M (for encoder) LJ1-1-R05 6 160 5 6 DP9320081-2 (for motor) DP9320089-2 (for encoder) LJ1-1-Y053 DP9320083-2 (for motor/brake) DP9320089-2 (for encoder) LJ1-1-Y05B 149 LXF (AC servomotor by Mitsubishi Electric Corporation) Model Manufacturer part no.