Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: D (N.O. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port: 04 (1/2), Option: Standard, Attachment: T (T Spacer), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port: 04 (1/2), Option: C [Float Type Auto Drain (N.C.)], Attachment: T (T Spacer), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: C (N.C. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: CM (C + M), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port: 04 (1/2), Option: Standard, Attachment: T (T-spacer), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: CE (C + E), Attachment: T (T-spacer), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

NCA1

Description q w e r t y u i o !0 !1 !2 !3 !4 Material Rod cover Head cover Cylinder tube Piston rod Piston Cushion ring Rod bushing Cushion valve Tie-rod Tie-rod nut Retaining ring Rod seal retainer Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Wear ring Rod jam nut Components included in a seal kit.

MTS

3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !5 Bumper Urethane Aluminum alloy !

Body Size: 40, Thread: Rc, Port: 04 (1/2), Option: C [Float Type Auto Drain (N.C.)], Attachment: T (T Spacer), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right->Left)

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Ionizer

0 o i u y t r e w q No. Description Type Contents Power supply indicator Illuminates when power is supplied. Flashes when the supply voltage is irregular. 1 LED (Dark green) Sensor indicator 2 Illuminates when the feedback sensor, autobalance sensor [high-precision type], or autobalance sensor [body-mounting type] is connected.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 40 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)