Process Pump

Actuating chamber A Actuating chamber A Actuating chamber B Actuating chamber B Discharge Discharge port port Pump chamber B Pump chamber B Pump chamber A Pump chamber A Suction port Suction port Diaphragm Fig. 1 Fig. 2 Fluid flow Air flow 13 11. Sensor mounting (leakage sensor) Series PAF can have a sensor for detecting diaphragm breakage.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

ZPT

(mm) Pad type Material ZPT Series Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 Connection 2004 2 x 4 Symbol Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 4010 4 x 10 (Thin section series) 02 04 2 M5 x 0.8 M6 x 1 M8 x 1 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 4 Male thread Female thread

V100

circuit 0.35 0.35 1 1 V114 V124 V114A V124A N.C.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Flow characteristics Note 1) Port size 12 [32 Note 2)] Flow characteristics Manifold 23 [21 Note 2)] 1, 2, 3 port Cv Cv C[dm3/(sbar)] 0.032 0.070 0.050 0.085 C[dm3/(sbar)] 0.050 0.085 0.032 0.070 b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 10-V114 10-V114A 10-V124 10-V124A 0.007 0.016 0.012 0.020 0.012 0.020 0.007 0.016 10-VV100-S41 type M5 x 0.8 Note 1) Values when manifold base (5 stations

Lock-Up Valve IL201/211/220 Series

How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

BP1000

: 1/4 inch NPT) -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa Material Code S, SH V V 0 No code MPA Ports B V3 1 2 10 -30 in.Hg to 30 psig 2P 4PL Please refer to the following porting configurations. 2) Pressure gauge unit MPa or psig/bar selectable.

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

IR30-OM00013

robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2- / 1 1.5 *3) *3) 1 1 () 3- IR3000 (1) 0.2%F.S (IR3000:F.S.=0.2MPa,IR3010:F.S.=0.4MPa,IR3020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa IR3000 IR3010 IR3020 [MPa] MAX. 1.0 [MPa] () 0.1 [MPa] 0.010.2 0.010.4 0.010.8 0.2% 0.5% 11.5l /min(ANR) [1.0MPa ] -560 Rc1/4,3/8,1/2

LZ-OM004xx

B C D 44 Mounting J ig to the piston 43 Mounting to workpiece Fem ale thread type Male thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-

EXxx-OMK0006

Baud rate Table Baud rate SW1 SW2 SW3 SW4 1000 0 0 0 0 800 1 0 0 0 500 0 1 0 0 250 1 1 0 0 125 0 0 1 0 1 0 1 0 50 0 1 1 0 20 1 1 1 0 10 0 0 0 1 : CAN LED illuminates RED when an invalid combination is set with DIP switches SW1 to 4.

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Mounting Bracket/Accessories L: Foot Note F: Front flange G: Rear flange C: Single clevis D: Double clevis Mounting bracket B: Basic (1 pc.) (1 pc.) (2 pcs.) (1 pc.) Note 2) Note 1) Standard Mounting nut Note 1) Rod end nut Clevis pin With pin T-bracket Option Note 1) Mounting nut is not included with integral clevis, single clevis and double clevis types.

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(A) 2 Manual override 1 None 1 (P) B (1) Locking style (Slotted style) Note) Consult SMC if N.O. type is desired Note 1) Only normally closed DIN connector in-line style is applicable.

VVX31/32/33

How to Order Solenoid Valves for Manifold VX31 [For liquid and gas (DC voltage)] 5 VX32 VX33 00 Electrical option Nil S L Z * B & & B % B '& & Electrical entry Model 7 G C D T =%& ><* =%& Orifice size 1 2 3 4 VC 5 6 77 6 6 0 6 Valve/Body 5 ='2 % 7 VDW Rated voltage * % *= % * *3 9= & * *3 1 2 3 4 5 6 7 8 9 ,, 9= 5,'., ?4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?