SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

LVQ

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 5.5 to 6.0 17-5-66 5 Series LVQ Integral Fitting Type (Hyper Fittings) Construction Double acting type N.O. type Basic type N.C. type PB PB q q q VC PA PA VDW e e e VQ VX2 A B A B SMC SMC VX A A B A B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

SL5200

w q w q SL5802S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 V3 V3 MPA MPA 2PW 3PW 4PW 1 1) Other range available.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

Coolant Valve

623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Title not found

q Check that actuator label for model number.

5

to step q.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

10

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 414 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod MBKW Series Standard Basic: (B) Cushion valve Port W V G 2 x Rc P G Width across flats KB Q E CJ1 CJP E D MM MM E KA B C CJ2 Section Q-Q Q JCM Width across flats B1 H1 A AL F H N MA MB Width across flats B1 ZZ + 2 x Stroke S + Stroke N F H + Stroke A AL H1 CM2 2 x 4

CJ2

Component Parts No. q w e r t y No. u i o !0 !

SMC Basic Pneumatics

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

80

Body material: Aluminum, PPS resin, Brass, Stainless steel Body material: PPS resin (One-touch fitting type) u y t r e w q u y t r e w q OUT 2 IN 1 OUT 2 IN 1 i Component Parts Component Parts No. Description Solenoid coil Fixed armature Tube Return spring Armature assembly Seal Body No.

IR1000/2000/3000

In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q i o !4 !5 o SUP side passage OUT side passage SUP side passage !5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

%silltr

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

Air Cylinder

1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.