Refrigerated Air Dryer

65 80 120 Outlet air pressure dew point Note 1) IDF IDU Standard condition (ANR) (7C) 15 31 46 83 101 152 Outlet air pressure dew point Air flow capacity m3/h (10C) 17 34 50 91 112 168 Outlet air pressure dew point IDF FS (3C) 13 25 37 68 83 125 Outlet air pressure dew point Note 2) Compressor intake condition (7C) 16 32 48 86 105 158 Outlet air pressure dew point IDFA IDFA (10C) 18 35 52

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

set screw) 2 x 9.5 counterbore depth 5.3 23 1 500.2 500.2 28 62 53 64 6.3 5 M6 x 1.0 x 18.5 L and M6 x 1.0 11.5 2 x M4 x 0.7 thread depth 6 (Hexagon bolt) (Hexagon nut) 2 x M5 x 0.8 (Through-hole) M6 x 1 x 12 L (Hexagon socket head cap screw) (Z) 8 x M4 x 0.7 thread depth 5.5 (Opposite side: Same) 30 6.5 12.5 7.75 9.5 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 8 10 52

Support Guide/11-LEFG Series

244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52

Environment

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1500 1500 1000 800 1000 1000 Lz 600 L3 [mm] L1 [mm] L2 [mm] 400 500 500 200 Ly Lx 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 Work load [kg] Work load [kg] Work load [kg] 52 Model Selection LEFS Series AC Servo Motor Clean Room Specification

Vacuum Filter AFJ Series

AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52

Series AK1000

Wetted Parts Material B Brass S 316 SS 316 SS Hastelloy C-22 PCTFE (Option: PTFE) Wetted Parts Body Poppet Diaphragm Seat 52 Series AK1300 Single Stage Regulator for General Applications High flow AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Dimensions inch (mm) AK1300 2.12 (53.8) Max

Modular Type Lubricators Series AL

NPT 1/2 NPT Accessories Panel Mounting Nut (Optional) AR20P-260S AR30P-260S AR40P-260S Mounting Bracket Kit (Optional) AW20P-270AS-X480 AR30P-270AS-X480 AR40P-270AS-X480 Model AW20 AW30 AW40 Dimensions Refer to drawings on page 7 Standard mm Dimensions Model Port Size C NPT 1/8 NPT 1/8 NPT 1/4 GaugePort D 40 53 70 Q 44 46 54 L 30 41 50 V 55 53 70 J 157(max.160) 218(max.221) 255(max.259) K 52

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

The set pressure can be adjusted by turning adjustment screw r , which adjusts the spring force. (23) 44 (500) eSwitch assembly rAdjusting screw wRegulating spring qPiston O-ring Adapter 52 Hexagon socket head cap screw Port R1/8 15 23 689

Pilot Operated Regulator AR425 to 935 Series

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

Manifold Regulator ARM1000/2000 Series

Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52

Compact manifold regulator ARM5 Series

IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3. Tie-rod for Centralized Supply Block Note) SRP Symbol Description Without tie-rod Nil T O-ring SRF With tie-rod Note) The O-ring is attached to the manifold connection. Note) For details, refer to page 705.

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Speed Controller with

AS1002F-23A 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 24.1 23 11 15.4 8.8 10.1 13.5 3.7 AS1002F-04A 4 9.3 7.7 10 37.6 4 AS1002F-06A 6 11.6 9.7 12 40.1 6.1 12.8 25.1 24 12.3 5 AS2002F-04A 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 31.4 30 12.6 17 10.5 12.3 13.5 6.1 AS2002F-06A 6 11.6 9.7 12 43.1 6.9 AS2052F-06A 6 12.8 11.5 4.3 7.8 13 16 52 7.6 17.2 36.2 34.6 17 22.5 12 16.1 17 11.8 AS2052F

Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3 Port Base Mounted Solenoid Valve, 3 PORT SOLENOID VALVE, 52

Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3 Port Base Mounted Solenoid Valve, 3 PORT SOLENOID VALVE, 52

Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3 Port Base Mounted Solenoid Valve, 3 PORT SOLENOID VALVE, 52

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