Compact Guide Cylinder Series MGQ (Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF
MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5
Note 2) Clevis width B (19.5 mm) is not available with mounting base K.
L1 L2 Model Applicable tubing O.D.d T Uni thread H D1 D2 L1 L2 L3 L4 A Max.
P8 Auto Switch Mountinq Position Minimum Allowable Stroke 23.5 12.5 poEirioninq oder lo maximizelhe high magneticlield rcsist Ulity. ;' l^t',. .1 ffiR '-T lls.{ +-!! : : l FA Jfr-_'+i Li:t CQ2 Single Rod Clevis CQ2 Double Rod Clevis !-{ TJ H l ! k CQ2 Double Rod Clevis Pin fhldfls$isfirco $enies Handling precautions 1 .
P8 Auto Switch Mountinq Position Minimum Allowable Stroke 23.5 12.5 poEirioninq oder lo maximizelhe high magneticlield rcsist Ulity. ;' l^t',. .1 ffiR '-T lls.{ +-!! : : l FA Jfr-_'+i Li:t CQ2 Single Rod Clevis CQ2 Double Rod Clevis !-{ TJ H l ! k CQ2 Double Rod Clevis Pin fhldfls$isfirco $enies Handling precautions 1 .
PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application
1 u y t r e w q i r e IN w IN q t y u i o !0 u y t o i !0 Component Parts Component Parts No. Description Material 1 Body ADC 2 Main valve Resin 3 O-ring NBR 4 Bonnet ADC 5 Seal NBR 6 Washer Fe (Chromated) 7 Compression nut ADC 8 Hexagon bolt Stainless steel No. Description Material No.
NBR, FKM t Aluminum alloy Piano wire y u i Note) et components determine the valve composition. Replacement Parts Part no. Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.
V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [dm3] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Thermometer Pressure switch Control circuit Solenoid valve Pressure control equipment
2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.
R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.
RB No. of piping surface Head cover Piping surface Operating direction Left Right r Front G H t Head cover WR Side w Head cover WL Side C D e Bottom E F y q J Bottom K L Front A B I DJ Note 1) The 6 types of tcentralized piping shown above are available in centralized piping model.
1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White) 12 to 24
Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Surface treatment: Nickel plated mm Material: Carbon steel mm Applicable bore size (mm) Retaining ring Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 l D d H B C Part no.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
RB No. of piping surface Head cover Piping surface Operating direction Left Right r Front G H t Head cover WR Side w Head cover WL Side C D e Bottom E F y q J Bottom K L Front A B I DJ Note 1) The 6 types of tcentralized piping shown above are available in centralized piping model.
Features 2 Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W Slide Bearing Guide Type/Cam Follower Guide Type 16, 20, 25, 32, 40, 50, 63 How to Order Y7BW 300 25 MY1 M W K Number of auto switches Guide type Auto switch type 2 pcs. 1pc. "n" pcs.
Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Carbon steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.