Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

19 1.5 4-M5 x 0.8 Prepared hole dia. 4.2 4-M4 x 0.7 depth 4.5 Piping port 2-M5 x 0.8 (Plug: M-5P) 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting reference planes B D 12 9.5 Section AA MXP12-25B Without magnet and switch rail 2-M2 x 0.4 depth 3 For magnet mounting 8 2-M3 x 0.5 depth 3.5 For rail mounting 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) L K MA V J S Z H M W Model

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

Stainless Steel 316 Fittings

x 1 M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 M M L Note) Value of FEP tube.

CV/MVGQ

1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 30 35 35 40 40 44 52 64 78 92 86 83 83 84 85 27 32 32 37 37 16 20 20 25 30 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Confirm that the load mass W (kg) does not exceed the value in the graph. W kg Applicable because it does not exceed the value in Graph (1). 0.2 420 V mm/s Load Factor 3 3-1 Load Factor of Static Moment Find the static moment M (Nm). M = W x 9.8 (Ln + An)/1000 Corrected value of moment center position distance An: Table (1) Examine Mr.

HRX-OM-Q033

Table 1.1-3 Communication mode and product functions DIO SERIAL Simple communication LOCAL DIO DIO REMOTE MODBUS protocol pattern LOCAL 1 2 Run timer x x x Stop timer x x x Recovery from power cut x x x Anti-freezing Pump accumulated operating time reset x x x Warming up function Snow coverage protect function*2 2: This function cannot be set on the products of the cooling method

HRX-OM-S010

-W.

Compact Cylinder

-100 M8 x 60L x 135L 60 135 15 CVQB405 x 65L M5 x 45L 65 45 20 10 x 70L x 50L 70 50 25 15 x 75L x 55L 75 55 30 20 x 80L x 60L 80 60 35 25 14.5 x 85L x 65L 85 65 40 30 x 90L x 70L 90 70 7.5 45 35 x 95L x 75L 95 75 50 40 x 100L x 80L 100 80 75 45 x 125L x 85L 125 85 -100 50 x 150L x 90L 150 90 75 x 115L 115 -100 x 140L 140 3 Series CVQ Allowable Kinetic Energy Rod End Allowable Lateral Load

CJ2X/CUX/CQSX/CQ2X/CM2X

1.25 M14 x 1.5 20 M10 x 1.5 M18 x 1.5 16 20 M8 x 1.25 M14 x 1.5 M10 x 1.5 M18 x 1.5 +1.0 0 mm Female thread Male thread M5 x 0.8 M5 x 0.8 Rod end thread JIS Class 2 Rod end thread tolerance Stroke tolerance Port size Vacuum port, Relief port Bore size (mm) 11(Vacuum type) +1.0 0 mm 12 16 20 25 M5 x 0.8, RC 1/8 Note) M5 x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure

RZQ

PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Process Valve Series VNA

A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 VCC 20 24 24 70 92 109 413 Series VNH Specific Product Precautions Be sure to read before handling.

Air Slide Table Series MXQ

is not available with shock absorber. x x BS x x x BT x x x x B x x x : Available, x: Not available Note 3) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.

VK300

: VK332-DM5 01 Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting

Plug-in/Plug Lead: Single Unit

specifications. 2-6-39 Series VQ5000 Construction Plug-in Unit Metal seal Rubber seal type e e q w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (

CNG

XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178) M10 x 1.25 107 8 6 14 M14 x 1.5 44 Rc(PT)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion 15 LH B 4 x LD Z Y X W LZ LX 2 x LC (Knock pin position) ZZ + S Stroke LS + Stroke Y X W M (mm) B 54.5 78 LS 54 LX 71 LZ 4 M 10 W 4 LC 7 LD 30 LH 3 LT 16.5 X 8.5 Y Z 63.5 205 ZZ Bore size 40 50 63 5 5 10 12 40 45 91 91 4.5 4.5 17.5 17.5 70.5 75.5 66 82 86 106 5 5 22 22 11 13 242 242 82.5 75.5 Other dimensions are the same as basic type.

Cylinder with Lock Series CLS

(mm) 125 140 160 LX LY M MM N P S X Y W H ZZ 100 221 27 M30 x 1.5 35 1/2 98 45 20 110 383 to 1400 112 246 27 M30 x 1.5 35 1/2 98 45 30 8 110 393 to 1400 118 275 30.5 M36 x 1.5 39 3/4 106 50 25 9 120 433 to 1400 For long strokes (mm) With rod boot (mm) Stroke range (mm) Bore size (mm) 125 140 160 Bore size (mm) 125 140 160 Stroke range (mm) RT l ZZ1 h RY 1/5 stroke 30 to 1400 133 406 1401

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.