Pneumatic Purification

Available N02 (1/4 NPT), N03 (3/8 NPT) and N04 (1/2 NPT) Metal bowl available as option (-2) Series SL Slimline Auto Drain and Filterstop SPECIFICATIONS Timer Solid-state construction Status Indication Power ON / Valve OPEN Interval Time 0.5 to 45 minutes (as required) Discharge Time 0.5 to 10 seconds (as required) Electrical Connection DIN 46242 LED indicators show operational status

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, DD, ZH NOZZLE SIZE 1.3, .11660 lb

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, DC, ZH NOZZLE SIZE 1.3, .08250 lb

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield Output interface Output interface Short circuit Short circuit protection protection Output circuit / Output circuit / Bus interface Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS BUS Fig. 12-3 EX245-DY1 79

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

0.4

3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2

HRX-OM-W002

M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG

IDX-OM-W023

MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2

Multistage Ejector Series ZL

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

LJ1H

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

Ionizer

or higher +100 V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

LV50-OMQ0002

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.