0.5

300 mm 300 mm 300 mm 4 s 4 s 6 s 6 s 8 s 0 8 s 0 8 s 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 2 s 2 s 300 mm 300 mm 300 mm 300 mm 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 0 2000 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 1600 2000 m] Extensive static neutralization area can

2/3 Port Valve

Symbol Q : Flow rate (Air and other gases l/min (ANR)) (Water and other liquids l/min) P: Pressure differential (P1-P2) P1 : Upstream pressure (MPa) P2 : Downstream pressure (MPa) : Temperature of air and other gases (C) S : Effective area (mm2) S 18Cv Cv : Cv factor ( / ) G : Specific gravity ( / ) Air/Water=1 4.2-6 VNA Port size 6A, 8A, 10A VX VN VQ Main Port Rc(PT) Model 1 8 1 4 3 8 VNA1

High Power Cylinder Series RHC

10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30

VFS

3-8-8.)

C95

8 !

MLGP

or more Vertical Upward Mounting Ball Bushing MLGPL20, 25 5 30mm stroke or less V = 200mm/s 6 Over 30mm stroke V = 200mm/s 20 20 25 10 10 20 5 5 25 Load weight m (kg) Load weight m (kg) 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 7 50mm stroke or less V = 200mm/s 8 Over 50mm stroke V = 200mm/s 300 300 100 100 80 100 100 80 63 63 50

MLGP

or more Vertical Upward Mounting Ball Bushing MLGPL20, 25 5 30mm stroke or less V = 200mm/s 6 Over 30mm stroke V = 200mm/s 20 20 25 10 10 20 5 5 25 Load weight m (kg) Load weight m (kg) 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 7 50mm stroke or less V = 200mm/s 8 Over 50mm stroke V = 200mm/s 300 300 100 100 80 100 100 80 63 63 50

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

Sine Cylinder Series REC

47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181

Sine Cylinder Series REC

47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Support Guide/11-LEFG Series

32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207 330 6 2 300 11-LEFG32-S-250 400 257 380 11-LEFG32-S-300 450 307 430 11-LEFG32-S-350 500 357 480 8 3 450 11-LEFG32-S-400 550 407

MK

8 !

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

(a) (b) Actuator effective torque S . Ta (S is 10 times or more) Allowable moment (Nm) Allowable thrust load (N) .

Rotary Table/

8 !1 @1 !2 q @0 u !

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

MM Bore size (mm) NB NDh8 24.5 20.5 20.5 GC F D BB A 6 10 16 NN Z 85.5 82 83 T 3 CA GA BA CB GB 5 5 S NA H 28 28 28 M3 x 0.5 M8 x 1.0 15 15 15 7 9.5 9.5 10-0.022 0 8-0.022 0 57.5 54 55 15 15 18.3 12 18.3 14 20 3 4 5 17 17 20 8 8 8 12 5 5 11 11 11 M10 x 1.0 M4 x 0.7 12-0.027 0 M12 x 1.0 M5 x 0.8 With air cushion Air cushion type is not available for 21-/22-CJ2.

Micro Mechanical Valve Series VM1000

8 P.T.

Air Pilot Operated Series NVSA

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?