SMC Corporation of America
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Search Results "ZM103H-B5LOZ-E14C-L"

Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5

L ERR L RUN PWR(V) PWR Outline Dimensions Precautions for maintenance Be sure to switch off the power. Check there is no foreign matter inside the SI unit. Check there is no damage and no foreign matter being stuck to the gasket. Be sure to tighten the screws with the specified torque.

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water

) +/-0.03 (Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Rubber bumpers as standard; Auto switch capable; Material restriction: Copper and Zinc free

(Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Air cushions standard; Auto switch capable; Material restriction: Copper and Zinc free

) +/-0.03 (Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Rubber bumpers as standard; Auto switch capable; Material restriction: Copper and Zinc free

(Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Air cushions standard; Auto switch capable; Material restriction: Copper and Zinc free

The S type is a high-vacuum type, and the L type is a large flow rate type.
Refer to the ZH10 models and “Flow Rate Characteristics” graphs below. Symbol “S” (-90 kPa) and “L” (-48 kpa or -66 kPa) are available for the vacuum pressure reached, but they are not related to the nozzle diameter.

9 @0 @1 Description Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm L Arm R Spring Main valve seal Guide cover Lever Tube O-ring O-ring Parallel pin Material o PBT PBT PBT Aluminium alloy Aluminium alloy Aluminium alloy PBT Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel HNBR Stainless steel PBT PBT NBR NBR Stainless steel Stainless

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 28 18 12.8 M4 6 22 62

L type connector w/ plug and 300 mm lead wire LO L type connector w/o plug and lead wire LN L type connector with plug and pins M M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation Type Sup.

Restart operation. 4.2 hole Maintenance space ( l ) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Applicable tubing O.D.

NCJP-L015 NCJP-Fo15 NCJP.TO l 5 24V DC or less,50mA x Auto switch can not be msta led with clev s or trunnion mount. OUT< f I t N + L r , l t (oz) Ihe rersht i. oarentfiess is wilh allo swhch. 3.6(3.8) 3.8(4.2) Additonal ltight 0.3 0.4 0.1 0.2 0.6 1.1 (Example) NCDIPFIO-o5o-90 Basic (with auto switch) +Additional weiqht (Flange mount): 2.9 + 0.2: 3l (oz).