HRX-OM-X084 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.3 Stop for a Long Time . 8-8 8.3.1 Discharge of the circulating fluid . 8-8 8.3.2 Discharge of the facility water (Water-cooled type) . 8-11 8.4
13 7 6 9 8 11 10 3 Connector B terminal no.
/ Word Bit 0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0
9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5 90 M5 19 19 27 M6 x 1 15 M6 x 1 5.4 9.5 7 Rc1/8 NPT1/8 G1/8 12.5 11 30 22 Bore size [mm] R S T U VA VB WA WB X XA XB YY YL Z 10 st or less Over 10 st 30 st or less Over 30 st 100 st or less Over 100 st 10 st or less Over 10 st 30 st or less Over
~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !
NN P S ZZ Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 1 8 1 8 1 8 1 4 20 M20 X 1.5 M8 X 1.25 150 to 700 18 15.5 13 26 8 20 13 10 41 5 8 33.5 5 20 30 146 200 M26 X 1.5 25 M10 X 1.25 150 to 700 22 19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 146 204 M26 X 1.5 32 M10 X 1.25 150 to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 159 217 M32 X 2 40 M14 X 1.5 200 to 1000
(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.
Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code Material FV4 MV4 TW4 FV6 MV6 TW6 Seat material Body Poppet 316L SS Code Diaphragm 316L SS Nozzle Code Material PCTFE (Standard) Vespel 3) S SHP SH 316L SS secondary remelt 316L SS No code Hastelloy C-22 Hastelloy C-22 Hastelloy
30 to 800 mm/s 30 to 600 mm/s Rubber bumper at both ends 0 to 5 mm compared to the standard stroke M3 0.5 M5 0.8 Rc (NPT, PF) 1/8 The maximum piston speed shown in the table above is for extension.
(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8
50 152 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 50 45 150 22 21 25 11 90 170 56 120 152 37 115 194 103 50 55 182 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V P U Y T R S O R Q 20 20 20 250 to 400 157 80 30 40 48 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/
inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N NPT 3/8 male Ports Code Ports 2P 2 ports Note) Only available with same type ttings inlet and outlet.
S Stations Applicable blank plate ass'y SYJ300-10-2A 2 stations 02 ... ... VQ 20 stations 20 R port A port M5 X 0.8, C4 P port Rc(PT)1/8 Rc(PT)1/8 A port side P port VQZ Rc(PT)1/8 M5 X 0.8 M5 R port 4 One-touch fitting C4 VZ A port M5 X 0.8, C4 Rc(PT)1/8 Note) If more than 8 stations, supply air to both sides of "P" Port and exhaust air from both sides of "R" port.
Rc 1/8 Rc 1/4 LL 28 30.5 37.5 KK 15 16 17.5 O 69 84 102 PP 56 62.5 77 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 MM 16 21.5 24.5 LL 28 30.5 37.5 KK 15 16 17.5 NN 22 26 37.5 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit
Rc 1/8 Rc 1/4 LL 28 30.5 37.5 KK 15 16 17.5 O 69 84 102 PP 56 62.5 77 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 MM 16 21.5 24.5 LL 28 30.5 37.5 KK 15 16 17.5 NN 22 26 37.5 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit