Vacuum Pad

8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Environment

LEC Speed [mm/s] Speed [mm/s] LEC S LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 90 50 LEC SS-T 80 Lead 4: LEY32C 40 43 Horizontal work load [kg] LEC Y 70 Vertical work load [kg] Lead 4: LEY32C 60 Lead 8: LEY32B 30 Motorless 50 Lead 8: LEY32B 22 40 20 LAT 30 Lead 16: LEY32A 11 20 10 LZ Lead 16: LEY32A 10 0 0 LC3F2 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s

CXS

ZZ CXSW32 SS 14 S 16 30 8 1614 8 Z (30) 38 2-6.9 through 2-11 counterbore with depth 6.3 2-M10 x 1.5 x 8 (Hexagon socket head set screw) 2-R3.5 8 36 1 96 1 5 6.3 0.2 75 98 76 44 75 2-R3.5 8 18 16 4-M6 x 1 (Through) 4-M5 x 0.8 with depth 8 2-M8 x 1.25 x 23 (Hexagon head bolt) 2-M8 x 1.25 (Hexagon nut) 2-M8 x 1.25 x 16 (Hexagon socket head cap screw) 8-M5 x 0.8 with depth 7.5 (Opposite side

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

C6 10-SY5000 S 5 VDC 8 One-touch fitting C8 3 position closed center 10-SY9000 has no bracket.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

CM2

X 1.5 40 10 5.5 15 30 22 13 7 4 60 25 75 8 45 26 34.5 37.5 M10 X 1.25 19.5 17 32 37 6 8 M26 X 1.5 40 12 5.5 15 22 13 7 4 60 32 75 8 45 26 21 47.3 M14 X 1.5 21.5 M32 X 2 42.5 46.5 22 41 8 10 52 14 7 24 16 7 5 66 36 40 82 11 50 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore Symbol P Q S Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ

Table of Contents

Weight (g) 5 7 8 13 14 Applicable tubing O.D. Applicable tubing O.D. Weight (g) 0.7 1.1 1.4 1.7 2.0 Applicable tubing O.D. Part no. Part no. Part no. Part no. N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

CL

1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 25 32 40 73.5 0 0.033 0 0.033 0 0.033 83.5 26 26 MY1 83.5 100.5 47.3 90.5 32 (mm) GK 3.5 4 4 4 N 15 15 15 NA 24 30 NN GL 6 9 9 11 H2 8 8 8 10 K 5 5.5 5.5 7 GQ 4 7 7 8 P PG 22 27 27 29 b 4 7 7 7 PH 19.5 24 24 24 H 41 45 45 50 PL 20 24 24 24 GC 8 9 9 8 H1 5 6 6 8 PW 38 41 41 41 GD 55 S 127 137 139 167 Bore 20 25 32 40 ZZ 181 195 197 233 Z 172 186 188 222

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

MGP

speed of 300mm/s.

CL

1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 20 73.5 55 3.5 10 Up to 300 57.5 13 18 9 8 15.5 8 6 13 38 80 4 8 CNS 25 26 83.5 64.5 4 10 Up to 300 69 13 22 9 9 19.5 10 9 17 45 90 7 8 32 8 26 83.5 64.5 4 10 Up to 300 69 13 22 9 9 19.5 12 9 17 45 90 7 CLS 40 11 32 90.5 70 4 15 Up to 300 76 16 24 10 8 21 14 11 22 52 100.5 8 CLQ H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1

Modular F.R.L. Unit

Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

B1 S + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A B1 D E F AL C GA GB H KA NA P TA TC ZZ H1 MM S TB I J 20 25 32 40 50 63 12 14 18 25 30 32 18 22 22 30 35 35 15.5 13 17 17 19 27 27 14 9.2 2 2 2 2 2 2 Up to 200 Up to 300 Up to 300 12 12 12 13 14 14 10 10 10 10(13) 12(14) 12(14) 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

•

S!! ' ~ > (>.3.5 ,A ~ ;8 ,8 8 F :~ 0 E G Flat Fiat wilh rile 0 E G I D E G 0 G E ZPT02U 2 2.6 1.2 M4 x 0.7 M5XO.8 ZPT04U 4 4:8 f6 0.8 6 23 8 8 29 12 6.2 4 1 .7 ZPT20g 20 23 14 5 23 8 12 29 ZPT06U 6 7 2.5 ZPT08U 8 9 T ZPT25l!

Aluminum High Vacuum Angle Valve

8-1 8-2 9 10 O-ring Part No.

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

Single Axis Electric Actuator Series LJ1H

Vertical Vertical m a a = 3000 a = 2000 200 L1 Mep 0 2 4 6 8 10 Transfer load m (kg) 600 a = 1000 a = 2000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 26 Standard Motor/Vertical Mount Specification Series LJ1H10 Dimensions/LJ1H102PB Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8