Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Note 2) Excluding LEFS16 Note 3) If 2 or more are required, please order them separately. (Part no. LEF-D-2-1 For details, refer to the Web Catalog,) Note 4) Order auto switches separately. (For details, refer to the Web Catalog.)

MVGQ

;= ,2 H+ % !+ LN+ * LO+ * MO+ * W+ * * !@ ! -! ;= ,2 E # ! -! , C.D 9 G+ , * !, -! + , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

SY3000-OMH0002

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 /

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Proper tightening torque (Nm) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) 6, 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% M3 M4 M5 M6 C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358

H

T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate Pipe Size 114, 112 2 Min Flow for Oil Drip 650 1800 Oil Capacity (cm3) 500 500 Model A B C Pipe Size Flow Rate ln/min 12500 16500

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93 V V V V No 100 V or

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

(PNP) 2-wire 5 V, 12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes Grommet 24 V IC circuit Water resistant (2-color indication) M9PAV M9PA M9BA M9BAV Magnetic field resistant (2-color indication) P3DW 2-wire (Non-polar) 3-wire (NPN equivalent) A96 A93 A90 A96V A93V A90V IC circuit

VFR5000-OMN0001

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1

AWM20 to AWM40

Note 7) Float type auto drain: The combination between C and D is not available. Note 8) Without a valve function Note 9) Metal bowl: The combination of 2 and 8 cannot be selected. Note 1) Drain guide is NPT1/8 (applicable to the AWM20, AWD20) and NPT1/4 (applicable to the AWM30 to AWM40, AWD30 to AWD40).

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

MHT2

5 V 12 V Diagnosis (2-color indication) 3-wire (PNP) 24 V F7PW F9PWV F9PW J79W F7BA F7BWV F9BWV F9BW F9BA Grommet Water resistant (2-color indication) 12 V 2-wire F7BAV With diagnosis output (2-color indication) 4-wire (NPN) 5 V 12 V IC circuit F79F Lead wire length symbols: 0.5 m Nil (Example) F9BW 3 m L (Example) F9BWL 5 m Z (Example) F9BWZ None N (Example) J79CN marked solid state

MHT2

S n pcs. n 2 fingers 2 Auto switch is attachable. For the applicable auto switch model, refer to the table below.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(at 0.5 MPa, without surge voltage suppressor) Note 2) Minimum operating frequency is once in 30 days. (Based on JIS B 8375.) Note 3) Note 1) and Note 2) are with controlled clean air. Note 4) Based on JIS C 0920.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Electrical entry 2(B) 4(A) Symbol Electrical entry L-type plug connector B Note 2) 5(EA) 3(EB) 1(P) L 4-position dual 3 port valves (N.C./N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Lead wire length 300 mm Symbol 3 6 10 15 20 30 100 Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

VFR2000-OMM0001

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (

Compact and

(Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

PF2M7.eng

Press the SET button for 2 to 5 seconds.

ITV2-OM0095

(Tightening torque 0.6 to 0.8Nm) Dipswitch ON 1 2 3 4 5 6 7 8 9 10 Enable or disable of Dip switch MAC ID Baud rate HOLD/CLEAR Setting at the time of shipment 1 2 3 4 5 6 7 8 9 10 Node address: 0 Baud rate: 125kbps Hold/Clear: Clear Dip switch: enable 8 - Setting of MAC ID MAC ID 1 2 3 4 5 6 0 OFF OFF OFF OFF OFF OFF 1 OFF OFF OFF OFF OFF ON 2 OFF OFF OFF OFF ON OFF : : : : : : : 62 ON ON

MHT2

F7BA 12V 2-wire MHT2 Water tight (2 color) F79F IC circuit 5V, 12V Diag. output (2 color) 4-wire (NPN) Latch style with diagnosis F7LF MHY2 32, 40 50, 63 output (2 color) BQ-2 Switch spacer Lead wire length 0.5m (Example) A80C 5m Z (Example) A80CZ 3m L (Example) A80CL N (Example) A80CN Solid state switch with mark is made to order.