Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 09 (5/16"), Sealant: S (Sealant)

Size: 30 (Size 3000, Flow 900Nl/min), Stations: 5 Stations, Piping Specification: B (IN: Individual), Thread: N (NPT), Port Size: 03 (PT 3/8)

Size: 30 (Size 3000, Flow 900Nl/min), Stations: 5 Stations, Piping Specification: A (IN: Common), Thread: N (NPT), Port Size: 03 (PT 3/8)

Filter Type: BFD (Bacteria Removal Filter, Nominal Filtration: 0.01μm; Bacteria Capture Performance LRV ≥ 9), Body Size: 40, Thread Type: N (NPT), Port Size: 03 (3/8)

Body Size: 3 (3/8), Control Type: 1 (Meter-in), Thread Type: N (NPT), Port Size: 03 (3/8), Applicable Tubing O.D.: 11 (ø3/8), Seal Method: S (With Sealant), Option: D (General Environment, Brass Parts, Ni Plating)

Body Size: 4 (1/2), Control Type: 1 (Meter-in), Thread Type: G (G), Port Size: 04 (1/2), Applicable Tubing O.D.: 12 (ø12)

Body Size: 1, Set Pressure: 1 (1.5 to 58 psi [0.01 to 0.4 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 01 (1/8), Option: G (Round Type Pressure Gauge), Semi-standard: None

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: G (G), Port Size: 02 (1/4), Applicable Tubing O.D: 06 (ø6)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: N (None), Bracket Option: B (Bracket), Control Unit: R5 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.4 MPa )

Size: 1, Reverse Flow: Regulator, Standard, Thread: G, Port Size: 1, Accessory: B+G, Option 1: 0.02~0.2MPa Setting, Option 2: -

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: G, Port Size: 1/8, Accessory: B+G, Option 1: -, Option 2: -

Size: 1, Reverse Flow: Regulator, Standard, Thread: G, Port Size: 1, Accessory: B+G, Option 1: -, Option 2: -

Size: 1/8, Reverse Flow: Regulator, Standard, Thread: G, Port Size: 1/4, Accessory: B+G, Option 1: -, Option 2: -

Size: 1/8, Reverse Flow: Regulator, Standard, Thread: G, Port Size: 1/4, Accessory: B+G, Option 1: 0.02~0.2MPa Setting, Option 2: -

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Body Size: 20, Backflow Function: w/Backflow Function, Thread: G, Port: 1/4, Option: B + C + G, Semi-Standard 1: 1 + 2, Semi-Standard 2: Standard, Made to Order: -

01-mxy-e

1, @2 and @6 each Wear ring B Resin MXY12-PS Cylinder scraper NBR As for MXY12, only one piston seal 26 is included. Piston seal NBR Replacement Parts: Grease Pack Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) 124

05-cg5s-e

1, !2. CG5A32SR-PS CG5A32SV-PS CG5A40SR-PS CG5A40SV-PS Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

05-cg5_s-e

1, !2. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

06-rebr-e

9 @0 @1 @2 @3 @4 @5 26 Cylinder tube gasket NBR Set of left nos. !9, @0, @1, @2, @3, @4, @5, #0 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal @4 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.