CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 28 8 M4 x 0.7 12 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 8 28 M5 x 0.8 10 16 31.5 86 66 Specific Product Precautions Be sure to read before handling. Caution on mounting Caution 1.

Vacuum Pad: Ball Joint Type

06 6 tube N NBR 08 8 tube S Silicone rubber Tightening torque (N m) U Urethane rubber F FKM Torque Mounting thread dia.

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

High Power Cylinder:

1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12

15

M10 x 1 RJ1007LN 40 70 90 90 4.5 9 73 16.5 87 18.5 37 106 M6 x 1 Rc1/8 NPT1/8 G1/8 38 1.5 CY1S25-Z M14 x 1.5 RJ1412LN 73 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 99 90 4.5 9 16.5 96 18.5 37 106 42 1.5 CY1S32-Z M20 x 1.5 RJ2015HN 91 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 5.5 11 18.5 116 18.5 37 128 50 3 CY1S40-Z M20 x 1.5 RJ2015LN M8 x 1.25 Rc1/4 NPT1/4 G1/4 65 105 142 120 4.5 9 99 20.5 139 17.5

HRX-OM-X071

Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-3 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.2.4 Inspection every 6 months . 8-8 8.3 Stop for a Long Time . 8-9 8.3.1 Discharge of the circulating fluid . 8-9 8.3.2 Discharge of the facility

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Max. impact speed (mm/s) 1500 1500 1500 1500 1500 Note 2) Use at a piston speed within the absorption capacity range. Refer to features page 8.

MXQ

(mm) (1) B A 2 2.5 4 5 5.5 10 Model MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 3 8-5-7 8 Air Slide Table Series MXQ 6, 8, 12, 16, 20, 25 How to Order Number of auto switches MXQ 12 50 M9N S L AS FR Symmetric type 2 pcs. 1 pc. n pcs.

CQS

Contents Action CQSB12-S-PS CQSB12-T-PS 12 12 Kits include items !2, !3 and !4 from the table above. CQSB16-S-PS CQSB16-T-PS 16 16 Kits include item !3 Single acting Spring return Single acting Spring extend CQSB20-S-PS CQSB20-T-PS 20 20 from the table above. CQSB25-S-PS CQSB25-T-PS 25 25 Seal kits consist of item !

KK/KK13

CAT.ES50-19 A S Couplers Series KK/KK13 Series KK Series KK13 Series KK/KK13 S Couplers Series KK Series KK Male thread type Connection thread size R 3/8 Series Body size 1/8 1/4 1/2 3/4 KK3 KK4 KK6 1/8 1/4 1/2 Female thread type Connection thread size Rc Series Body size 3/8 1/2 1/8 1/4 KK3 KK4 KK6 1/8 1/4 1/2 Nut fitting type Applicable hose I.D.

Slider Type/Ball Bushing Bearing

0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical Data 1533 CY1H Series Dimensions Double axis type: / 25, 32 CY1HT25/32 LL 138 PA 4 x M thread depth MM 25 32 CY1HT -B XB PB XA S + Stroke 2 x Rc 1/8 LW EA EB HC HP H HA HT HG HB NT Square nut for body mounting

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Modular Type Filter Regulator Series AW

30.5 38.5 K 5 3.5 1.5 N 34 40 54 Q 5.4 6.5 8.5 S 15.4 8 10.5 M 30 41 50 P 44 46 54 Y 14 19 21 Z 6 7 7 V 30 31 35.5 W 28.5 38.5 42.5 B 190 242 278 U 2.3 2.3 2.3 T 55 53 70 AWM20 AWM30 AWM40 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Optional specification With drain guide B With barb fitting B Metal bowl B 173 214 252 Metal bowl with level gauge Model B AWM20 AWM30 AWM40 208 246 209 247 234 272 70

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

Compact Type Dual-Rod Cylinder Series CXSJ

30 to 800 mm/s 30 to 600 mm/s Rubber bumper at both ends 0 to 5 mm compared to the standard stroke M3 0.5 M5 0.8 Rc (NPT, PF) 1/8 The maximum piston speed shown in the table above is for extension.

ISA2

(With HW, SW) M4 x 8 Rc, NPT, G 1/8 With DIN rail L1 5 38 3 38 L2 LED level meter Lead wire connector End plate L End plate R 3 0 3 0 3 0 center DIN rail 92 34 17 Setting dial P P P T T T U U U E E E L L L L L L S S S 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Plug 20.5 SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 24 L3 11.2

Thermo-chiller/Rack Mount Type

8 No.

Cylinder with Lock Series CNS

B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 to 1400 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA LD LH LS LT LX LY MM N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85