Compact

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

CL

To lock the piston in the stationary state for the purpose of drop prevention, the piston can be locked up to a maximum speed of 750mm/s.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

CL

Piston speed over 200 mm/s (When locking) 4. Immediately before a lock stop, drop the piston speed to 200 mm/s or lower by switching the speed controller (to the bypass circuit).

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

High Vacuum Angle Valve, XL Series

A space is established between the end of the adjustment screw (9) and the shaft of valve S (18), which regulates the amount of movement of the piston S (11). The initial exhaust conductance is determined by the amount of opening between valve S (18) and the valve seal S [1](14). Further turning is prevented by locking after adjustment.

Table of Contents

An S coupler without check valve experiences leakage of fluid inside piping when it is uncoupled. Pay special attention in using fluid that can cause danger such as fluid of a high temperature and pressure. Additional use of a stop valve is recommended. 6. The S coupler is heated when used at a high temperature. Take precautions not to touch it since touching it can cause burns.

SV

91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

CM2

B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5

Profi-E

S. consi st s of 12 bi t s, t o t he E/P regul at or t hrough m ast er PLC( i nput t i ng t arget val ue t o 0 area) . a f orm ul a> Set pressure / F. S. pressure range x 4095 The val ue obt ai ned by t hi s f orm ul a i s convert ed t o a hexadeci m al num ber f or sendi ng.