NVZseies

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode

Metering Valve with Silencer Series ASN2 1

34 55 107 1 8 1 4 3 8 1 2 Specifications 1.5 MPa 0 to 1 MPa 5 to 60C (No freezing) 10 turns (8 turns Note)) Proof pressure Operating pressure range Ambient and fluid temperature Number of needle rotations AS ASP Note) ( ) is the case of ASN2-M5 and ASN2-U10/32.

05-hyc-e

8 and @1. Order the seal kit based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) 90

PF2x3.eng

Hysteresis mode 2 Panel Item Default settings Model button (UP) Panel mount adapter Item Default setting ( ) PF2A30 series [10L] 1 to 10 L/min type (PF2A510) Indicator LED (OUT1) Set point 1 Set point 2 Hysteresis 1 Hysteresis 1 50% of max. rated flow [n_1] Input of the Set point 1 (OUT1) PF2A31 series [11L] 10 to 100 L/min type (PF2A511) button (SET) ON 50% of max. rated flow [n_2] Input

EX600-SEC_eng

The M12 SPEEDCON connector connection method is explained below. (1)Align mark B on the metal bracket of the cable connector (plug/socket) with mark A. 7 RUN Displays the module status. 1 10 8 ERR Displays the network status. 9 Content (2)Align with mark C on the unit and insert the connector vertically. If they are not aligned, the connector cannot be connected correctly. No.

PFMB.eng

Flow setting (3 step setting mode) Function setting (Function selection mode) Other functions [1000] 1000 L/min (PFMB7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. [ 10] 10 L/min (PFMB7201) [ 25] 25 L/min (PFMB7501) Do not use the product for flammable fluid. Fire or explosion can result.

3 Way,3 Port Solenoid Valve NVZ Series

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB

10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

Switches Solid State Switch Connection and Examples

Applicable actuator Terminal arrangement 1 Brown + Vcc 1 L 2 White 2 Sensor 3 Black OUTPUT 3 4 Blue GND (OV) 4 Normally ON when light is blocked.

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19.

0.5% F.S.10 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressure? (Direct operated)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?