Micro-Mist Separator with Prefilter Series AMH

6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm)

Series AP500

When the source pressure is 2300 psig (15.9 MPa), achievable delivery pressure is around 129 psig (0.89 MPa). 12 Series AP1400T Single Stage Regulator for Ultra High Purity Intermediate flow (Tied-diaphragm) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High inlet pressure Changes

Quick Exhaust Valve Series AQ

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2

Compact manifold regulator ARM5 Series

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Display + 12 to 24 VDC 2% F.S.1 digit (25C3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

6 Body size If more than one option is required, write option part numbers in the order of K, N. 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size (1) 4 6 8 10 12 04 06 08 10 12 Electroless nickel plated (3) Brass PBT PBT/Stainless steel NBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated Elbow type Control method Meter-out Meter-in 0 With One-touch fitting

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

EX600-SEN_eng

Composing the unit as a manifold Names of individual parts MAC address label Displays the 12 digit MAC address which is different for each SI unit. Connector (BUS IN) Connects the cable for fieldbus inputs. Valve plate mounting groove Groove to insert the valve plate into. Display cover tightening screw Loosen to open the display cover.

EX600-SEN3_4_eng

(BUS OUT and PCI) 12 Red/green flashing alternately Detect a communication error between SI unit and I/O unit. Assembly SI unit has failed. Red ON Connector pin assignment The power supply voltage for control and input is properly. Green ON Configuration PWR The power supply voltage for control and input is out of range.