Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient
Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note
: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 460 VAC, u Piping length: Shortest 6 Fluid ow rate to maintain the cooling capacity.
Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note 5)
Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC
Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: T
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter), Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: T (w/o Operation Manual, Calibration Certificate
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C4L (ΓΈ4 One-touch Fitting, Elbow Type), Lead Wire: w/o Lead Wire, Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: T (w/o Operation Manual, Calibration Certificate
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: T (w/o Operation Manual, Calibration Certificate)
Plug Connector: T (T-branch Type Communication Plug Connector)
Cable, Communication Plug Connector: T (T-branch Type Communication Plug Connector)
Cable, Communication Plug Connector: T (T-branch Type Communication Plug Connector)
Motor Mounting Position: D (In-line Motor Type), Lead: J (16mm), Stroke: 150mm, Motor Option: B (w/Lock), Body Option: S (Dust-protected), Mounting: H (w/Side Holder, 4 pcs.), Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: T (T-branch Type Communication Plug Connector)
Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 150mm, Motor Option: W (w/Lock/Motor Cover), Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: T (T-branch Type Communication Plug Connector)
Size: 16, Motor Mounting Position: D (In-line), Lead: A (Size 8: 10mm, Size 16: 12mm, Size 25: 16mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: T (T-branch Type Communication Plug Connector)