SYJ3000/5000/7000

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P R S P R R port 1/8 R port 1/8 A, B port size Nil Rc A B B A A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 M5 F G M5 x 0.8 A, B port M5 x 0.8, C4 N C4 NPT 4 One-touch fitting T NPTF N3 5/32" One-touch fitting Type 41 (5 port/Base mounted) How to Order 10 SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid pilot valve is on same side as the A, B port.

Fluoropolymer Piping Equipment

Metric size Inch size 6 8 10 12 19 25 4 3 Series 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Appearance Class 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 Space saving union elbow LQ1E-S SMC LVC P.908 LVA Space saving union tee LQ1T-S LVH SMC LVD P.908 LVQ Space saving panel mount union LQ1P-S LVP LVW P.908 LQ1 LQ1 Space saving union LQ1U-S SMC LQ3 LVN P.908 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

8 !

7ND9071en

or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0 130.0 602 282 17200 1 10 mm or 3/8" 752 441 26900 1 10 mm or 3/8" B1J B1JA Stroke volume dm3 / in3 NPT Piping Air (s) Spring (s) Piping Air (s) Spring (s) Piping Air (s) Spring (s) 6 0.47 28.7 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 10 mm or 3/8" [6 mm or 1/4" (x)] 8 0.9 55

MNB

n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 110 85 115 120 2 (Different sides, same side) 70 20 25 60 (n 2) 2 60 + 55 (n 4) 2 85 + 55 (n 4) 2 (n 4) 2 110 + 55 (n 4) 2 115 + 55 (n 4) 2 120 + 55 (n 4) 2 (n 2) 2 25 + 55 20 + 55 70 + 55 n (Same side) D-A59W n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12,

MNB

(n 4) 2 15 + 40 n = 2, 4, 6, 8 80 + 40 85 + 40 90 + 40 n = 4, 8, 12, 16 95 + 40 n n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 85 2 (Different sides, same side), 1 10 60 65 70 D-Y69 D-Y7PV D-Y7WV 75 + 30 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 85 + 30 (n 4) 2 60 + 30 65 + 30 n = 4, 8, 12, 16 70 + 30 n 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12,

XL

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

Cylinder with Lock

n = 4, 8, 12, 16)*2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 115 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 75 80 95 105 110 D-A5m D-A6m n 75 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12

NCA1

) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF SA XA ZA 150 (1.5) 5/8 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1/8 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 1 1/4 1 1.71 2.36 3 5/8 6 5 5/8 6 1/16 200 (2) 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 1 3/4 1 1.71 2.4 3 5/8 6 5 5/8 6 3/16 250

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

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Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

8 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 300 mm/s 30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

VFR

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C

High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

LEY-OM007

SET DATA SET 4.3 [] P21~P29 0mm 20mm 1 No. 1 20.00mm 250mm/s 1 No. 1 0.00mm 250mm/s MENU 20 SET -8- 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16)

7

. 146 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water Dimensions/VXD2 /2 /2 Body Material: CAC408 7 E 8 F 9 G Conduit terminal (V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical