20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

Steam Valve

74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74

IDUS/IDFS

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 1 B = 0.95 based on conditions q, w and e C = 1.00 based on

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47 Programless Controller (With Stroke Study) Series LECP2 LEMB LECP2 LECP1 LECP6 LEC-G LEMC LEMH/HT Model Selection Specific Product Precautions Controller Details e r No. Display Details Description t Power supply ON/Servo ON : Green turns on.

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -52No.EX-OMV0017 (e).

PFxx-OMJ0005CN

10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I

Rotary Table

The end angular speed is obtained by: t Table 9 Allowable kinetic energy (J) Size Allowable kinetic energy : Rotation angle [ rad ] : Rotation time [ s ] 1 0.001 Kinetic energy E is obtained by: 2 0.0015 3 0.002 7 0.006 E Therefore, the rotary table rotation time is: E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] During uniform acceleration, the

CUJ

3 w e q !1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Parts list Replacement parts: Seal kits (double acting) Contents Note No. Description Material Kit no. Bore size 1 Hard anodized Aluminum alloy 4 CUJB4-PS Cylinder tube 2 Above numbers 11, 12, 13 and an exclusive grease pack.

Stainless Steel Heat

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based on

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Condition Condition Inlet air temperature 35 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)