RSH/RS1H

10 to 60C (with no condensation) Ambient and fluid temperature RSH Not required (non-lube) Lubrication CEP1 Rubber bumper Cushion +1.4 0 CE1 Stroke length tolerance Flange Mounting CE2 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size

MVGQ

R port (with plug) 4-MM depth ML Solenoid valve: Series VZ5000 4-NN through Speed controller RS Q G RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

MTS

40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 20 30 40 50 10 2 3 4 5 Weight W (kg) 40 32 1 0.5 0.4 0.3 0.2 16 25 20 12 0.1 50 100 200 5 20 30 40 10 Overhang L (mm) 8-10-6 6 Model Selection Series MTS Horizontal Mounting 8 Maximum speed: Up to 500 mm/s Maximum speed: Up to 300 mm/s Graph (8) Stroke: Up to 10 stroke Graph (11) Stroke: Up to 10 stroke 0.1

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

LG1H

Maximum acceleration: 3000mm/s2 Positioning distance (mm) 400 200 100 10 1 10 40.4 20.4 10.4 1.4 0.5 Speed (mm/s) 100 4.5 2.5 1.5 0.6 0.5 250 2.1 1.3 0.9 0.6 0.5 500 1.4 1.0 0.8 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions. 153 8 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Without Coupling Motor Output Rolled Ball Screw 100W 15mm /20mm

17

8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

o

(172) 7.19 (182.5) (1931 8.01 (20s.51 8.,13 8.84 (214) \224.s) L2 1.12 (28.5) (39) 1.95 (49.s)2.36 (m) 2.74 (70.5) 3.19 (8rJ 3.60 (9.5) 4.O2 oml 4.43 (a2.s) 4.4 (123) (133.5) (144) 6.OA (1s4.5) 6.50 (i65) {175.5) 7.32 (186) (196.5J 8.15 (207) (217.5) Tgpe 32 Manifold: Side Ported,/ NVV5J3-32 r,Etslje\g-M5, 83T inch (mm) Grommet (G) .

o

(172) 7.19 (182.5) (1931 8.01 (20s.51 8.,13 8.84 (214) \224.s) L2 1.12 (28.5) (39) 1.95 (49.s)2.36 (m) 2.74 (70.5) 3.19 (8rJ 3.60 (9.5) 4.O2 oml 4.43 (a2.s) 4.4 (123) (133.5) (144) 6.OA (1s4.5) 6.50 (i65) {175.5) 7.32 (186) (196.5J 8.15 (207) (217.5) Tgpe 32 Manifold: Side Ported,/ NVV5J3-32 r,Etslje\g-M5, 83T inch (mm) Grommet (G) .

IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

CRQ2

S: Upper space 90, Lower space 180 6 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 TF effective depth TL Sizes 20, 30, 40 TA TB 45 BE CA CA BU 8-JJ (opposite side 4 places) 2-J through (opposite side JA counter bore depth JB) BD B With double shaft DD W D I K Auto switches b (10) Max. 2-Rc1/8 (port size) H F (US) M (UW) CB Q BC N BB BA BA G D A (AU) Max S L TF effective depth TL

CL

8 !

EXxx-OMV0017-D

) 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s Available Set the sampling frequency of the analog input equipment.

VZS

or less 600 0.2 0.31 0.13 1.3 0.25 0.12 1.1 1 8 VZS Pressure center VZS2550 600 22 or less 0.2 0.33 0.19 1.4 0.26 0.12 1.2 1 8 VFS Double check VZS2650 500 26 or less 0.3 0.81 0.71 1 8 VS4 Note 1) Min. operating cycle is based on JIS B 8375 (One time per 30 days).

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Single Axis Electric Actuator Serriies LJ1S Slider Guide

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Limit switch Series 10 Series 20 Series 30 10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(172) 7.19 (182.5) (1931 8.01 (20s.51 8.,13 8.84 (214) \224.s) L2 1.12 (28.5) (39) 1.95 (49.s)2.36 (m) 2.74 (70.5) 3.19 (8rJ 3.60 (9.5) 4.O2 oml 4.43 (a2.s) 4.4 (123) (133.5) (144) 6.OA (1s4.5) 6.50 (i65) {175.5) 7.32 (186) (196.5J 8.15 (207) (217.5) Tgpe 32 Manifold: Side Ported,/ NVV5J3-32 r,Etslje\g-M5, 83T inch (mm) Grommet (G) .