AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

VZM500

1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/4, Option: D + G, Attachment: S + T, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/4, Option: N.O. Float Type Auto Drain, Attachment: S + T, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: N.O. Float Type Auto Drain, Attachment: T-Interface, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator, Attachment: K + T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: Standard, Attachment: K + T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/4, Option: N.O. Float Type Auto Drain, Attachment: S + T, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: D + G, Attachment: S + T, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: N.O. Float Type Auto Drain, Attachment: S + T, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/2, Option: Standard, Attachment: T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/4, Option: for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator, Attachment: T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/4, Option: Standard, Attachment: T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: N.C. Float Type Auto Drain, Attachment: T-Interface, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: N.O. Float Type Auto Drain, Attachment: S + T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: N.O. Float Type Auto Drain, Attachment: T-Interface, Semi-Standard 1: Lubricator w/Drain Cock, Exhaust Port, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: N.O. Float Type Auto Drain, Attachment: T + V, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: Standard, Attachment: S + T, Semi-Standard 1: Lubricator w/Drain Cock, Exhaust Port, Semi-Standard 2: Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: Standard, Attachment: S + T, Semi-Standard 1: Standard, Semi-Standard 2: Standard