5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less1150 g3/4, 1Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 100/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)975? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 100/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)975? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 100/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)975? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 100/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)975? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 100/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)975? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?