ISO Cylinder

D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15 + 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6)

Made to Order

(mm) Bore size (mm) Without auto switch With auto switch Without auto switch With auto switch A B Q OA OB RA RC 12 16 20 25 30.5 30.5 34 37.5 17.5 17.5 19 21 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7 7 10 10 14 14 17 17 35.5 35.5 44 47.5 27 27 29.5 32.5 32 32 39.5 42.5 CQ2 series 2 x 5.5 through 2 x 2 x 9 counterbore depth 17 (Bottom side counterbore depth 7) Th9 10 10 B + Stroke

Hydraulic

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Table of Contents

2.05 45 90 Component Parts IF33-10 500 420 2 1/2 Middle 0.74 to 2.30 80 160 Material No.

Vacuum Pad

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Foot style: CQ2L Special cap bolt A B L L1 LS Bore size (mm) 12 16 20 25 LD LG LH LT LX LY LZ X Y 5 st 10 st 5 st 5 st 10 st 10 st 5 st 10 st 5 st 10 st 45.3 4.5 2.8 17 2 34 29.5 44 8 4.5 55.3 10 22 15 27 18.5 23.5 29 34 46.8 4.5 2.8 19 2 38 33.5 48 8 5 56.8 11.5 23.5 16.5 28.5 18.5 23.5 30.5 35.5 51.2 6.6 4 24 3.2 48 42 62 9.2 5.8 61.2 12.5 24.5 17.5 29.5 19.5 24.5 33.5 38.5 54.7 6.6 4

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

Auto Switch Guide

2-color indication with diagnostic output Grommet Band 10-20-51 MK(2) Grommet Rail 10-20-52 Grommet Tie-rod 10-20-53 RS Q G Water (coolant) resistant type D-H7BAL D-G5BAL D-F7BAL D-F7BAVL D-F5BAL D-F9BAL D-Y7BAL 10-20-54 RS H A Band Grommet Water resistant 2-color indication 10-20-55 Solid state switch RZQ 10-20-56 Rail Grommet 10-20-57 Tie-rod Grommet MI W S 10-20-58 Direct Grommet CEP1

REA/REB

precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Proposals for Energy Saving

Model Description AR1000 AR2000 B220 AR2500 B320 AR3000 B420 AR4000 AR4000-06 B640A Note 3) AR5000 AR6000 Bracket B120 B220 B420 B640A Note 3) Note 1) Note 2) G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 1.0MPa G36-10-01 Pressure gauge 0.2MPa (G27-10-R1) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 Auxiliary Pneumatic Equipment Air Preparation Equipment

MY1

side M4 x 0.7 depth 7 4-M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 depth of counter bore 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 10 Mechanically Jointed

Air Cylinder

10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46

ZP

R 10 39.5 23.4 12.5 10 G2 2 M10 04 06 A10 14 3 10 10 2 6 10 85 51 x 1 23 20 123 61 51 30 133 71 40 169 81 77 50 179 91 30 (Rotating angle) 13 16 40 23.9 13 10.5 10 to 32 10 126.5 58.5 S N S U F GN GS 20 123.5 68.5 30 133.5 78.5 50 178.5 98.5 75 50 20 25 46.5 29.3 15.5 12.5 J K Mounting Bracket Assembly Thin Flat Type with Ribs ZP R F Width across flats Q 2 12 3 10 127 59 47 29.8 16 13 50

Table of Contents

Applicable shaft type: W (mm) L2 Y (mm) Size CRB2 10 X L1 5 (8 Y) to (Y 1) 3 to 8 Size CRBU2 10 15 5 to 14 9 (14 X) to (X 3) 3 to 9 6 (9 Y) to (Y 1.5) Y= L1 = 15 20 8 to 18 10 (18 X) to (X 4) 3 to 10 7 (10 Y) to (Y 1.5) L2= CRB1 20 30 10 to 20 10 (20 X) to (X 4.5) 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 to 22 12 (22 X) to (X 5) 7 to 15 9 (15 Y) to (Y 2) MSU Symbol

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

10 Duty ratio: 100% 7500 7500 5000 5000 2500 2500 0 0 0 1 2 3 4 0 2 4 6 8 10 Work load [kg] Work load [kg] LEFS25lV6A/Ball Screw Drive LEFS25lV6A/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500

ZP

x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.