Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) L2 Y (mm) Size CRB2 10 X L1 5 (8 Y) to (Y 1) 3 to 8 Size CRBU2 10 15 5 to 14 9 (14 X) to (X 3) 3 to 9 6 (9 Y) to (Y 1.5) Y= L1 = 15 20 8 to 18 10 (18 X) to (X 4) 3 to 10 7 (10 Y) to (Y 1.5) L2= CRB1 20 30 10 to 20 10 (20 X) to (X 4.5) 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 to 22 12 (22 X) to (X 5) 7 to 15 9 (15 Y) to (Y 2) MSU Symbol

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) L2 Y (mm) Size CRB2 10 X L1 5 (8 Y) to (Y 1) 3 to 8 Size CRBU2 10 15 5 to 14 9 (14 X) to (X 3) 3 to 9 6 (9 Y) to (Y 1.5) Y= L1 = 15 20 8 to 18 10 (18 X) to (X 4) 3 to 10 7 (10 Y) to (Y 1.5) L2= CRB1 20 30 10 to 20 10 (20 X) to (X 4.5) 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 to 22 12 (22 X) to (X 5) 7 to 15 9 (15 Y) to (Y 2) MSU Symbol

15

FJ FF 2 x FA thread depth FB FJ FC Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH FJ FK M1 M2 PD NZ 2 x M4 x 0.7 7.5 46 30 3.7 11 42 M2.5 x 10 M3 x 8 8 NY 2 x M3 x 0.5 5.5 45 30 5 11 38 M2.5 x 10 M3 x 8 8 NX 2 x M4 x 0.7 7 46 30 3.7 8 42 M2.5 x 10 M3 x 8 8 NM2 3.4 31 28 8.5 7 3.5 42 M2.5 x 10 M3 x 8 6 25 NZ 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 M4 x 12 14 NY 2

Air Fittings & Tubing

Weight (g) a b M2 L d M1 16 17 2 2 4 6 KQ2N04-06 KQ2N06-08 17 18.5 6 8 10 12 16 38 42 47 51 55 2.5 4 6 8 9 8 KQ2N08-10 21 18.5 13.2 10 KQ2N10-12 22 21 18.2 12 KQ2N12-16 25 22 29 Tube cap: KQ2C Tube O.D.

LEC-OM02704CN

(CN2) () 2. 3. () A21 3 () 1. 2. A24 (U VW) 1. 2. 3. UVW A24 10 6 10 A25 1. () 23 2. 3. 4. 23 10 7 10 A30 1. PA02 2. 3. 1. 2. 3. 4. LECSC2-AC260V LECSC1-AC135V 5. 6. 1. 2. A31 1. 2. 3. 1. 2. 4. (PA06PA07) 5. A32 ((A32) OFF/ON 1. (UVW) 2. (IPMIGBT) ON UVW (A32) (IPMIGBT) 3. (UVW) 2. 4. ) 10 8 10 A33 1. LECSC-DC400V 2.

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

Series SV

(M3 x 10, 2 pcs.)

SX

1 U side D side Valve stations Note Stations Symbol 02 2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

Rotary Actuator/Vane Type

) 7 to 20 10-(20-X) to (X-1.5) 30 10 to 22 12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

CJ2

Because the retaining screws extend into the cylinder, this could lead to an air leak. 2 (different surfaces) 15 1 10 2(same surface) 65 D-C73C D-C80C D-H7C ( ) 6 2(different surfaces) 15 10 1 10 2(same surface) 65 16 D-H7LF(1) 2 (different surfaces) 25 1 15 D-A7/A8 D-A7H/A80H D-A73C/A80C 10 2 5 1 D-F7 D-J79 D-F7V D-J79C D-A79W D-F7W D-J79W D-F7BAL D-F7WV D-F79F Rail mounting 2 5 1 5 2 15

F

31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2 83 15 18.5 22 5/16 9.5 62 KM11-09-13-10 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

AC

-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Table of Contents

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N

LEC-OM07605CN

P3P4 2. AC200V240VL1L3L21.3 3. 1 14 2. 2 . 2 2.1 . 3 2.2 . 5 2.3 . 5 2.4 SSCNET . 6 2.5 . 8 2.6 . 9 2 1 2. 2 1.3 LECSS2-T8CNP1CNP2CNP3CN3CN8 2 2 2. 2.1 (1) (a)1 40 mm 80 mm 10 mm 10 mm 40 mm 2 3 2.

ZP

Thin flat Thin flat with ribs Table (2) Pad Diameter/Stroke Diameter (mm) Thin flat/Thin flat with ribs Stroke(mm) 2 8 3.5 x 7 4 x 10 4 6 10 13 16 20 25 32 40 50 2 x 4 13 16 10 6 10 15 20 25 30 50 40 Table (3) Vacuum Entry/Mounting Thread Diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 Thin section series 10 to 16 10 to 32 40, 50 Symbol Thread dia.

1

5 9.5 8 7 8 6 CXS15 +0.016 +0.001 6 5.2 1.5 C0.5 5.5 25 0.1 M6 x 1.0 M5 x 0.8 5 3 +0.3 0 0 0.2 +0.2 0 +0.2 0 CXS20 10 10 9.5 2 7 11 10 8 9.5 8 0.05 0.15 +0.016 +0.001 8 6.2 2 C0.5 6.6 28 0.1 M8 x 1.25 M6 x 1.0 6 +0.2 0 +0.2 0 CXS25 0 0.2 12 12 11.5 2 7 11 12 8.5 9.5 10 0.05 0.15 +0.3 0 +0.019 +0.001 10 6.2 2 C0.7 6.6 35 0.1 M8 x 1.25 M6 x 1.0 6 +0.4 0 CXS32 +0.2 0 +0.2 0 +0.019 +0.001 0 0.2