VNH

Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !2 is energized, the pilot air supplied to the bottom of the piston u moves upward to open the valve element A t and closes the valve element B y. Because rod !0 is connected to valve element A t by parallel pin !1.

VXR21/22/23

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

RB/RBL/RBQ

Component Parts Description Outer tube Piston rod Piston Bearing Return spring Stopper Material Rolled steel Special steel Special steel Description Check ball Accumulator Rod seal Scraper Bumper Material Bearing steel Fluoro rubber NBR NBR Polyurethane Treatment Treatment Black nickel plated Heat treated, Hard chrome plated Heat treated No. q w e r t y No. u i o !0 !

Compact

+X +Y X Y End deflection (when extended) + Non-rotating accuracy 5 Compact Cylinder with Linear Guide MXZ Series Mounting Bolt Mounting Bolt for MXZ When using through holes, use the mounting bolts from the CQ series. Refer to the following for ordering procedures. Order the actual number of bolts that will be used. Example) CQ-M3 x 25 L 2 pcs.

Clean Room Rodless Cylinder Series CYP ø15, ø32

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke

2-Color Display

Z directions, for 2 hours each (Non-energized) 100 m/s2 in X, Y, Z directions, 3 times each (Non-energized) 2% F.S.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

Action Head cover type N E F Y Rubber bumper V V V V Auto switch mounting type*1 A Rail mounting B Band mounting Cylinder stroke [mm] Refer to the next page for standard strokes. Mounting bracket*1 Made to order For details, refer to page 3.

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10 How to Order LEPY 10 K 50 1 1 R 6N q w e r t y u i o !

IZSE_X101

1 Output 3-Screen Display High-Precision Digital Pressure Switch RoHS IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

3 Position Cylinder Series RZQ

X Y X LG Y LS Full stroke A + Full stroke LZ LX 4 x LD 32 57 57 71 11.2 5.8 40 64 64 78 11.2 7 50 79 78 95 14.7 8 63 95 113 16.2 9 91.5 Rod side flange style: RZQF 4 x FD Flange Style (mm) FV M Bore size (mm) AR AH B FD FT FV FX 32 100.5 108.5 82.5 5.5 56 8 50 FT 40 110 118 62 92 5.5 8 56 L B + Full stroke FX FZ AR + Full stroke 50 118.5 127.5 96.5 76 6.6 9 67 63 130 139 102 92 9 9 90 Bore

Pin Cylinder/Single Acting, Spring Return Series CJP

CJPS4-G CJPS6-G 4 6 10 15 CJPS4-G CJPS6-G CJPS10-G CJPS15-G 5 NBR Piston seal 5 is a non-replaceable part Special product (O-ring) embedded type only Left no. y CJPS10-G CJPS15-G y Gasket For the plug mounting style Since gaskets (10 pcs./set) do not include a grease pack (10 g), order it separately. Grease pack part no.: GR-S-005 (5 g) 7

Multistage Ejector Series ZL112.212

X, Y, Z directions, for 2 hours each 2% F.S.