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Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 1.15 CFM / 33 LPM , 1.15 CFM / 33 LPM, Max Pressure: 30 PSIG / 2.1 bar , 30 PSIG / 2.1 bar, Max Vacuum: 23.8 in HgV / -807 mbar , 23.8 in HgV / -807 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 7.81 in / 198 mm Width: 4.75 in / 121 mm Height:

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60

5.2 0.7 9 10.5 4.7 0.7 16.5 11.4 48.7 3/16" 10 40.7 11.6 27.7 13.5 6.2 14 6.2 27.7 15 13.7 12 40.7 1/4" 40.7 9.3 31.9 12.7 5.2 11 12.3 7.2 1.2 16 44.8 11.6 33 13.5 6.3 12.7 9.3 40.7 5.2 31.9 5/32" 15 33 53.2 12.8 35.2 17 6.7 12.3 7.2 1.2 16.5 11.4 50 6.2 32.8 3/16" 21 15.5 7.2 1.2 36 59.8 15.2 36.5 18 8.1 17 13.2 52.2 7.1 33.7 1/4" 19 56 59 12.8 45 17 7.4 16.5 11.4 52.2 6.2 34.9 3/16" 35 60

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

Li , I z I With auto switch Bore size 47.5 52.5 57.5 21.5 35.5 40.5 45.5 3 62.5 20 6 30.5 6 10' 45.5 .50.5 \ 55,5 60.5 75. 7 ~.Jo 2 1 _~ 35.5 \ 40.5 55.5 \ 3 26 :60:5 00.5 30.5 45.5 54.5 59.5 64.5 69.5 79.5 9 33.5 15 35.5 40.5 55.5 \ 4 23 ~ . eorEt size ; D ., E NN A X B' F GA GB LH LX A lI' B Mt\1 oLC ~ ~T : H ~ . . . Y .. ".,.. , ",. ,." ,. ,." , .. .' .

Model Gripping force per finger Gripping force Note 1) Open/ Close stroke (Both sides) mm Bore size mm 10 16 20 25 Note 2) Weight g Model External Internal 60 125 250 455 4 6 10 14 17 40 66 104 9.8 30 42 65 11-MHZ2-10D 11-MHZ2-16D 11-MHZ2-20D 11-MHZ2-25D In-line electrical entry Lead wire type Explanatory drawing L Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at

61.5 74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60

Rated voltage Manual override Symbol Nil: Non-locking push type A: Non-locking push type (Manual) E: Push-turn locking type (Manual) DC AC (50/60 Hz) 2(A) 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] 5 24 VDC 6 12 VDC (P)1 3(R) Electrical entry Light/surge voltage suppressor DC AC Nil Without light/surge voltage suppressor S With surge voltage suppressor *1 DIN terminal

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Next, measure this flow rate at 80%, 60%, 40%, and 20%, as well as the upstream and downstream pressure. The sonic conductance C can be calculated based on this maximum flow rate. Substitute the data of the others into the subsonic flow formula to find b, and calculate the critical pressure ratio b from that average.

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 469 b XLAQ Series Specifications XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 Model Flange (valve) size 16 25 40 50 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (

1.0 0.3 0.1 0.8 0.3 Reverse pressure potential MPa(G) *2 0.5 0.25 0.4 0.2 0.05 0.2 0.15 Leakage Pam3/s *4 Internal 1.3 x 109 External 1.3 x 1011 Piping connection system Face seal fitting/Compression fitting/(Rc, NPT) Female thread Face seal fitting (inch) Compression fitting (inch) 1/4 3/8 1/4 3/8 Connection size (Rc, NPT) Female thread 1/8 1/4 3/8 Ambient and fluid temperature C 5 to 60

SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 How to use this table 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left) column the bore size recommended

1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange 40 4B flange 60

www.stevenengineering.com Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Self-standing type AMF801/901 Piping Support type AMF800 to AMF1000 20 80 AMF 1 20 80 AMF 0 Body size Body size 80 90 80 90 Port size Port size 100 Vessel shape 20 2B flange 30 3B flange 40 4B flange 20 2B flange 30 3B flange 40 4B flange Vessel shape Piping support type Self-standing type 60

load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0 RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60

60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 Data 10-9-13 13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.