10 7.5 10{8.7} 6.1 7.3 7.3 6.3 8.1{7.4} 5.6 8.9 8.9 7.1 14{8.3} 5.7 12 12 7.4 13{8.9} 6.1 1.9 1.9 1.8 1.9 2.0{0.78} 2.4 2.4 2.0 2.2 2.6{0.85} 2.1 2.1 1.7 1.9 2.1{0.85} 2.2 2.2 2.0 2.0 2.0{0.74} 2.7 2.7 2.1 2.4 2.6{0.78} 0.46 0.46 0.46 0.42 0.51{0.50} 0.44 0.44 0.43 0.40 0.50{0.49} 0.49 0.49 0.35 0.33 0.35{0.48} 0.34 0.34 0.34 0.27 0.33{0.48} 0.43 0.43 0.41 0.39 0.18{0.47} 7.1 7.1 6.7 7.1
Spare elements and O-rings for the cover are sold in sets of 10 pieces each.
10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,
Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.
Link, No Activity (10 Mbps) Specification Str Frunzei 29, Sector 2, Bucharest, Romania Orange LED flashes. Link, Activity (10 Mbps) LINK/ACT2 100 Mbps: Green 10 Mbps: Orange Red LED is ON. IP address has been duplicated. EtherNet/IPTM is not connected.
Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5
Also, take measures to prevent ingress of water and foreign matter from the breathing port of the diaphragm. 5-5-10
13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10
(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF. (Value in the initial state) Caution Be sure to read before handling.
(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF. (Value in the initial state) VFRA VPA4 SYJA Caution VZA Be sure to read this before handling the products.
E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum
/8 1/4 H 41 45 45 50 H1 5 6 6 8 20 0 0.033 0 0.033 0 0.033 0 0.039 20 26 26 32 M10 X 1.25 25 M10 X 1.25 M14 X 1.5 32 40 Boss-cut Dimensions for Other Mounting Brackets Bore ZZ 106 110 112 141 Add 3mm to each ZZ dimension of the standard style (double acting/single rod) on p.1.4-10 to 1.4-18. 20 Auto Switch Position Basic Low friction 25 CM2QB20SCM220A, #1 CM2QB25SCM225A, #1 CM2QB32SCM232A
"ALrto switch detail: see pgs. 10-11.
Setting range: 1 to 99 (10 dec.) Example: Example: 2 Address is set in network by using ET200 hand held unit or PG (programing tool). Once address is set, it is saved even if power is cut. Setting range: 1 to 125 (10 dec.) Value set on shipment: 125. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.
10 7.5 10{8.7} 6.1 7.3 7.3 6.3 8.1{7.4} 5.6 8.9 8.9 7.1 14{8.3} 5.7 12 12 7.4 13{8.9} 6.1 2.2 2.2 1.8 0.33 0.34 0.43 0.43 0.43 0.33 0.34 0.43 0.43 0.43 0.51 0.52 0.66 0.66 0.66 0.51 0.52 0.66 0.66 0.66 0.56 0.57 0.71 0.71 0.71 VFA5120-02 2 1 4 3 VFA54 20-02-X1 5 0.45{0.47} 0.37 0.49 0.49 0.38 2.2{2.1} 1.4 2.9 2.9 1.9 Base mounted (1) Body ported 0.51{0.50} 0.44 0.44 0.43 0.40 2.0{0.78} 2.4
0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40
Consult factory for strokes less than 10mm. 6.1 16 External Feedback Lever (IP6000 type) Stroke Order Code Unit Number Size M Size N P368010-20 5 9/10" 4 9/10" 10~85 mm (Nil) 5 M N P368010-21 7 2/3" 4 1/3" 35~100 mm (E) P368010-22 10 4/5" 4 1/3" 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 6 0 0 0 / I P 6 1 0 0 IP6000 TYPE: LEVER TYPE FEEDBACKNO TERMINAL BOX (FM Model) IP6000 TYPE:
"ALrto switch detail: see pgs. 10-11.
Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4
Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4