Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

C95

10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n-2)/

MB

to 750 to 750 50 55 70 80 100 120 7 9 9 9 12 14 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 141 145 164 164 202 202 MB1 FT FX CA2 FZ ZZ + Stroke CS1 C76 Single clevis: (C) C85 Port Single Clevis CD H10 (mm) C95 Bore size (mm) Stroke range H10 CX 0.1 CD L RR Z U ZZ 0.3 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 10 10 14 14 22 22 164.5 169

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For type W, only DC voltage is available. 58 Base Mounted 10-SY3000/5000/7000/9000 Specifications 10-SY3000 10-SY5000 10-SY7000 Air 10-SY9000 Series Fluid Internal pilot operating pressure range (MPa) 0.15 to 0.7 2 position single 2 position double 3 position Operating pressure range 0.1 to 0.7 0.2 to 0.7 100 kPa to 0.7 0.25 to 0.7 0.25 to 0.7 0.25 to 0.7 10 to 50 (No freezing.) 10 3 5 3

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 125 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 With n pcs. (Same surface) 60 65 75 80 85 90 10 With 1 pc. With 2 pcs. (Different surfaces) 70 75 80 85 90 35 With 2 pcs.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Tie-rod Type Hydraulic Cylinder

25 92 233 106 11 50 10 9 3/8 43 30 10 73 225 60 28 99 251 112 11 1/4 stroke 63 12 10 3/8 47 37 10 80 243 65 30 106 269 116 11 80 16 13 1/2 57 40 13 90 270 80 32 116 296 127 11 100 20 16 1/2 66 47 13 100 297 100 35 123 322 137 12 1/5 stroke 125 20 16 1/2 77 55 15 100 307 100 35 123 328 137 12 160 24 20 3/4 94 60 20 108 343 120 38 131 366 155 12 401 CHA Series Dimensions Rod flange type: CHAF

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 9kg Positioning time (sec) Positioning time (sec) 150 100 50 10 1 150 100 50 10 1 Positioning distance (mm) Positioning distance (mm) 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 3.1 2.1 1.1 0.3 0.1 3.1 2.1 1.1 0.3 0.1 100 100 1.6 1.1 0.6 0.2 0.1 1.6 1.1 0.6 0.2

MLGP

1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6

MLGP

/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10

Table of Contents

100 200 400 1.5 3 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2)

Compact Guide Cylinder

50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 Load mass m [kg] Load mass m [kg] 25 25 20 20 16 16 12 1 1 12 0.1 0.1 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 100 100 10 10 50 50 Load mass m [kg] Load mass m [kg] 40 40 32 32 25 25 1 1 20 20 16 16 12 12 0.1 10 100 0.1 10 100 Eccentric

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

LEC-OM02704CN

100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15 0.5 LECSC-S8 LE-S80.9 35 15 0.7 1.