Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

EXxx-OMP0004CN

No.EX-OMP0004CN-I SI (CC-Link ) // EX260-SMJ 2 8 9 10 10 11 LED 16 21 26 26 27 28 -1No.EX-OMP0004CN-I (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Table of Contents

S page 11-3-4.

Air Slide Table

fluid temperatures 10 to 60C IN 75 15 23 30 38 45 53 50 to 500 mm/s (Metal stopper with bumper: 50 to 300 mm/s) (Metal stopper: 50 to 200 mm/s) 12 6 OUT 226 45 68 90 113 136 158 Operating speed range (Average operating speed) IN 170 34 51 68 85 102 119 16 6 OUT 402 80 121 161 201 241 281 in the standard stroke table on page 11: 50 to 300 mm/s IN 346 69 104 138 173 207 242 Cushion (Without

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

Title not found

Line No. 90 L Adapters Male to Female X2 S/S . P3, L10 X3 S/S . P3, L10 X4 S/S . P3, L10 RX3-2-3-2 S/S. P4, L12 RX3-1-1-1 S/S. P4, L12 M8-6x6-8 S/S . P20, L78 Y8 S/S . P4, L14 3/8BK-6 S/S . P18, L69 C1 S/S. P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S .

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

CQ2

166 191 161 11 191 99 136 116 161 134 20 10 77 10 to 50, 75, 100 179.5 145.5 11 179.5 204.5 170.5 11 204.5 117 145.5 136 170.5 154 22 12 94 2.3-37 Compact Cylinder/Standard: Single Acting Spring Return/Extend Series CQ2 12, 16, 20, 25, 32, 40, 50 How to Order 10 B 20 S CQ2 Standard A73 S B 20 10 S CDQ2 With auto switch Number of auto switches With auto switch 2 1 n Auto switch S n (Built-in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

2/3 Port Valve

Fluid Table q Rated voltage-Electrical entry-Electrical option Standard specifications Option (1) G C Class B D, T Class H G, C T S(1) S L, Z L, Z S Air (general, dry) Vacuum (up to 1Torr) Turbine oil, Carbon dioxide gas (CO2), Nitrogen gas (N2) Freon 11, 113, 114 Air (dry) (T) High temp, water (D, E) Argon, helium (F) Insulation Electrical entry Electrical option 1 (100V) 2 (200V) 3 (110V

CRQ2

(without keys on the long shaft) J Double round shaft K Shaft end form 11-8-12 to 11-8-24 Pattern Rotation range -X6 Shaft, parallel key stainless spec. 11-8-1 2 Compact Rotary Actuator Rack & Pinion Style Series CRQ2 Size: 10, 15, 20, 30, 40 How to Order Without auto switch With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 F9BW S Shaft type Built-in magnet Courtesy of Steven Engineering, Inc

CRB2/CRBU2/CRB1

R E (g6) Q3 Q2 F (h9) B Q1 P C D G1 G2 J K L M N Model A 90 180 270 M5 M3 3.4 (5.5) CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE M3 (6) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 0 0.036 15 24 8 14 9 3 1 5 9 0.5 0.004 0.012 29 4 M3 M3 (5) 3.4 (6) M5 M3 M3 (10) 0.004 0.012 0 0.043 20 29 9 18 12 4 1.5 6 10 0.5 5 34 M3 M4 (7.5) 4.5 (11) M4

ZP

P Q R 4 4 6 20.6 21.6 15.6 16.6 S 10.4 12.8 6 a e Y b c d Model ZPR2004U 2 1.2 0.3 4 2.6 4.6 ZPR3507U 3.5 1.8 0.5 7 4.3 7.8 ZPR4010U 4 2 0.8 10 5 11 Flat/Flat with Ribs Dimensions of D are the same.