Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

171 13.5 248 237.5 219 14.5 173 162.5 139 17 Stations L1 L2 L3 L4 11 298 287.5 267 15.5 12 310.5 300 283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

Nozzle Type Ionizer

saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0.7 0.7 0.6 0.6 Supply pressure [MPa] Supply pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 20 25 10 15 5 0 200 100 150 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] eFemale threads for piping IZN10E-11 With Stainless steel 316 One-touch fitting + Anti-static tubing Pressure gauge 0.30 O.D.

MIW/MIS

HC HD HE JA JB KA KB LA LB LC MA MB MC NB NAB 6 8.5 6 9 M2.6 x 0.45 M3 x 0.5 M4 x 0.7 M6 x 1 25 35.5 MD 34 43.5 ME 37 54 19 28.5 Model MIW12-12 MIW20-20 +0.030 0 4 5 3.5 5 19 28.5 11 15 7.6 14.5 2.2 2.8 37 53 7.5 9.5 12.5 16.5 2.5H9 4H9 +0.025 0 8 Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FE through Attachment mounting

Escapements Series MIW/MIS

HC HD HE JA JB KA KB LA LB LC MA MB MC NB NAB 6 8.5 6 9 M2.6 x 0.45 M3 x 0.5 M4 x 0.7 M6 x 1 25 35.5 MD 34 43.5 ME 37 54 19 28.5 Model MIW12-12 MIW20-20 +0.030 0 4 5 3.5 5 19 28.5 11 15 7.6 14.5 2.2 2.8 37 53 7.5 9.5 12.5 16.5 +0.025 0 2.5H9 4H9 8 Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FE through Attachment mounting

CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Note 2) Brass parts are all electroless nickel plated.

Rotary Gripper Series MRHQ

opened 4 11 closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides) 10 3-3H9 long groove depth

CC

Compact hydraulic cylinder conforming to JIS Series CHKDB Nominal pressure (MPa) Bore size (mm) Stroke (mm) Action Fluid Series CHKDB CHKGB 20 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Compact hydraulic cylinder Series CHKGB 25 RE A B Hydraulic fluid 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75 32 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid REC Light and compact alminum

MLGC

For detailed specifications, refer to page 9-15-1.

MLGC

For detailed specifications, refer to page 9-15-1.

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

AZ1000

Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Connections (Inletq, Outletw) Bonnet option 01 02 06 10 15

5 Port Air Operated Valve

M5 x 0.8 [5 (EA), 3 (EB) port] 18 (Pitch) P=27.5 Dimensions (Common to Type 30 and Type 31) n: Stations 20 11 12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 L1 L2 569.5 74.5 102 129.5 157 184.5 212 239.5 267 294.5 322 349.5 377 404.5 432 459.5 487 514.5 542 64.5 92 119.5 147 174.5 202 229.5 257 284.5 312 339.5 367 394.5 422 449.5 477 504.5 532 559.5 1515 VFA1000/3000/5000 Series Dimensions

Fieldbus system Ethernet POWERLINK compatible SI unit

2006h 00h DXD, IN 0 15 (Slot 2) RO : : : 2020h 00h RO *1: RO means Read Only data.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

Angle Seat Valve /

, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C.

Modular Type Lubricators Series AL

268 B 85 124 166 200 200 274 292 B 162 196 196 270 288 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 512 Lubricator Series AL10 to AL60 Dimensions Semi-standard specifications: 1000 cm3 tank AC-A 106 2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact

PFxx-OMJ0005CN

17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 13 11 17 13 39 17 NPT1/81/4 G1/8 G1/8 G1/4 17